1. Fabrication and photoelectrical properties of AZO/SiO 2 /p-Si heterojunction
- Author
-
NanSheng Zhang, XiaJie Meng, Zhongquan Ma, Bo He, Cunxing Miao, Feng Li, Jing Xu, Ling Shen, Cheng Shen, Lei Zhao, ChengYue Zhou, and YanLi Shi
- Subjects
Materials science ,Fabrication ,Silicon dioxide ,Electrical junction ,business.industry ,Doping ,Heterojunction ,Sputter deposition ,chemistry.chemical_compound ,chemistry ,Sputtering ,Optoelectronics ,Thin film ,business - Abstract
ZnO thin films doped with aluminum (AZO) were deposited on silicon dioxide covered p-Si (100) substrates by radio frequency magnetron sputtering, to fabricate AZO/SiO2/p-Si heterojunction, as an absorber for ultraviolet cell. The optical and electrical properties of the Al doped - ZnO films were characterized by UV-VIS spectrophotometer, current-voltage measurement, and four point probe technique, respectively. The results show that AZO films have good quality. The electrical junction properties were investigated by I-V measurement, which reveals that the heterojunction shows typical rectifying behavior.
- Published
- 2009
- Full Text
- View/download PDF