Samples of four materials (Herculite 80, SSM 3084, FRAS 140, and Teflon), designated for a soil analysis instrument designed for a Mars Surveyor Program lander, were exposed to a peroxide plasma and immediately sealed in sterile bags. The purpose of this surface analysis was to evaluate the effect of cleaning procedures mandated for biological sterilization, in accordance with international treaties. Comparison of XPS measurements was made with as-received samples. Herculite is a plastic-coated weave, SSM 3084 is a sandwich of two polymers and a silver film, and FRAS 140 is a flexible, transparent polymer film.