Author: "Karasawa, Minoru" / Journal: thin solid films - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Karasawa, Minoru"' showing total 3 results

Start Over Author "Karasawa, Minoru" Journal thin solid films

3 results on '"Karasawa, Minoru"'

1. Preparation of poly-Si films by Cat-CVD for thin film transistor

Author: Sunayama, Hideki, Yamada, Kazutaka, Karasawa, Minoru, and Ishibashi, Keiji
Published: 2003
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2. Development of Cat-CVD apparatus for 1-m-size large-area deposition

Author: Ishibashi, Keiji, Karasawa, Minoru, Xu, Ge, Yokokawa, Naoaki, Ikemoto, Manabu, Masuda, Atsushi, and Matsumura, Hideki
Published: 2003
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3. Development of Cat-CVD apparatus — a method to control wafer temperatures under thermal influence of heated catalyzer

Author: Karasawa, Minoru, Masuda, Atsushi, Ishibashi, Keiji, and Matsumura, Hideki
Published: 2001
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