5 results on '"Takoudis, Christos G."'
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2. Characterization of titanium oxynitride films deposited by low pressure chemical vapor deposition using amide Ti precursor
3. Film strain and compositional changes in thermally nitrided silicon dioxide thin films
4. Two-step processes for bimodal N concentration profiles in ultra-thin silicon oxynitrides
5. Rate-limiting steps during nitrogen incorporation in furnace-grown silicon oxynitrides: effects on wafer-to-wafer uniformity
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