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The multi-principal AlCrNbSiTiON oxynitride coatings were deposited by pulsed arc ion plating under different oxygen flow. The structure and mechanical properties of the coatings were systematically investigated. The surface of all coatings is smooth and flat. The cross section is compact and smooth. The coatings transform from FCC solid solution crystal structure with (200) preferred orientation to amorphous/nanocrystalline nanocomposite structure with increasing oxygen flow. Upon increasing oxygen flow from 0 to 150 SCCM, their hardness decreases from 43.4 to 15.6 GPa. The hardness of the coatings increases to 26.4 GPa with increasing oxygen flow again. The Cr 2 O 3 oxides are formed on the surface of the coatings during the friction process. • The cross sections of all coatings are featureless and dense. • The coatings transform from FCC structure to amorphous/nanocrystalline structure. • The strengthening of amorphous/nanocrystalline structure leads to the increase of hardness. [ABSTRACT FROM AUTHOR]

High entropy (AlCrNbSiTi)N hard coatings have been deposited by pulsed arc ion plating with various duty cycles. The effects of duty cycles on the morphology, chemical composition, microstructure and mechanical properties of coatings are studied. Higher duty cycles result in the increase of deposited particles and holes on the surface of the coatings. The coatings exhibited a single-phase face centered cubic structure with preferred orientation of (200). Appropriate duty cycle can significantly improve the comprehensive mechanical properties of the coatings. The coating exhibits highest hardness and elastic modulus of 43.4 GPa and 573.4 GPa, respectively. Formation of surface oxides during friction process are observed, which play a self-lubricating role. • The cross sections of all coatings are featureless and dense. • The coatings have typical single-phase B1–NaCl FCC solid solution crystal structure with (200) preferred orientation. • Coating deposited at 60 % duty cycle exhibits highest hardness of 43.4 GPa. [ABSTRACT FROM AUTHOR]