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Auger electron spectroscopy and electron energy loss spectroscopy (EELS) have been used to characterize the oxide InPO4 whose thickness is about 10 A˚ as grown on the substrate InP (1 0 0). The behaviour of the surface was studied following either electron irradiation or heating in UHV. The high sensitivity of the EELS, showed a structural change of the surface after irradiation with electrons of 5 keV energy, InPO4 being sensitive to the electron beam. However, this surface oxide appeared to be stable when heated in UHV at 450°C. [Copyright &y& Elsevier]