Search

In order to obtain films with better mechanical properties and fracture toughness, the (TiAlCrZrNb)- Six-N (x=0, 4%, 8%, 12% and 16%) high entropy ceramic nanocomposite films with different Si contents were deposited on Si substrate by magnetron sputtering technology. The effects of Si doping on the microstructure, mechanical properties! and fracture toughness of the films were investigated by X-ray diffractometry, scanning electron microscopy, high-resolution transmission electron microscopy and Nano indentation apparatus. The results show that the mechanical properties and fracture toughness of the films increase first and then decrease with the addition of Si element, which can be attributed to the formation of nanocomposite structures. When Si content is 4%, (TiAlCrZrNb)-Six-N film has the best comprehensive mechanical properties, and Us maximum hardness and elastic modulus are 22.7 GPa and 192.0 GPa, respectively. In this case, the fracture toughness reaches the best, and the radial crack length C as 6.760 µm, The K1C was 1.77 MPa • m1/2. [ABSTRACT FROM AUTHOR]