1. Study on vdW Epitaxy Mechanism and Stress Modulation of Large-Size GaN Microwave Material.
- Author
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LI Chuanhao, LI Zhonghui, PENG Daqing, ZHANG Dongguo, YANG Qiankun, and LUO Weike
- Subjects
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SAPPHIRES , *MICROWAVE materials , *METAL organic chemical vapor deposition , *GALLIUM nitride , *EPITAXY - Abstract
Based on metal organic chemical vapor deposition (MOCVD), growth mechanism and stress modulation of van der Waals (vdW) heteroepitaxial GaN microwave material were studied with few-layer BN as an interlayer on 4-inch sapphire substrates. The influence of AlN nucleate process on growth mechanism of GaN buffer layer and its correlation with crystalline quality, stress, and electrical properties were discussed. A stress modulation scheme based on AlN/ AlGaN composite nucleation process is proposed, achieving stress well in control for large-size vdW heteroepitaxy firstly. The as-grown GaN microwave material possesses a wafer bow of + 20. 4 μm, fullwidth at half maximum of GaN (002) / (102) peaks of 471. 6/933. 5 arcsec, root-mean-square roughness of 0. 52 nm and electron mobility of 2 000 cm² / (V·s). Finally, largesize wafe-scale GaN microwave material was successfully separated from sapphire substrate by a mechanical lift-off process, providing convenience for transfering to high thermal conductivity substrates and creating conditions for fabricating high-power RF devices. [ABSTRACT FROM AUTHOR]
- Published
- 2024