1. Fabrication of periodically ordered δ-MnO2 nanoarrays by polystyrene nanosphere etching.
- Author
-
DENG Guowei and WANG Jiale
- Subjects
MAGNETRON sputtering ,ETCHING ,SEMICONDUCTOR materials ,TRANSMISSION electron microscopy - Abstract
Periodically ordered δ-MnO
2 nanoarrays were prepared using polystyrene (PS) nanosphere etching combined with hydrothermal growth. The seed layer was obtained by magnetron sputtering of MnO2 target. Then a monolayer of self-assembled close-packed PS nanospheres was deposited on MnO2 seed layer to form a patterned template. The size of PS nanospheres was reduced by reactive ion etching (RIE), and the gaps between PS nanospheres were covered by magnetron sputtering of SiO2 target. After removing the PS nanospheres, periodic MnO2 seed sites were obtained on the substrate for following hydrothermal growth. The ordered nanoarrays with periods of 800 and 500 nm were fabricated by choosing PS nanospheres of different sizes. Transmission electron microscopy (TEM) was used to confirm that the MnO2 material in the array was in the S phase. The research results provide a method for finding low-cost fabrication of ordered nanoarrays of semiconductor materials. [ABSTRACT FROM AUTHOR]- Published
- 2023
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