1. 基于 犃犾Al０.8Sc０.2犖压电薄膜 MEMS声波器件的研制 .
- Author
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黄湘俊, 邸 啸, 刘 娅, 李 鑫, 易拥洁, 吴鹏程, 安 兴, and 朱 鑫
- Subjects
SOUND pressure ,ACOUSTIC devices ,SOUND waves ,LEAK detection ,HYDROPHONE ,PIPELINES - Abstract
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- Published
- 2022
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