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This paper addresses the quality control of the photolithography process in the semiconductor industry. Overlay errors in the process seriously affect the wafer yield, and cause the wafer to be forced to rework and affect the production efficiency of the equipment. We examine the current state of its process control, develop a novel overlay predict model, and verify the prediction results. This study proposes a Global Attention Generative Adversarial Networks (GAGAN) model to precisely predict the overlay error for the feed-forward data of the front layer, which is used as the important information and process parameters for the advanced process control of the current layer. Experiment results on a semiconductor shop-floor confirms that our proposed method achieves high predictive performance while maintaining extensibility and visual quality. [ABSTRACT FROM AUTHOR]

How to model the effect of reflection is crucial for single image reflection removal (SIRR) task. Modern SIRR methods usually simplify the reflection formulation with the assumption of linear combination of a transmission layer and a reflection layer. However, the large variations in image content and the real-world picture-taking conditions often result in far more complex reflection. In this paper, we introduce a new screen-blur combination based on two important factors, namely the intensity and the blurriness of reflection, to better characterize the reflection formulation in SIRR. Specifically, we present Screen-blur Reflection Networks (SRNet), which executes the screen-blur formulation in its network design and adapts to the complex reflection on real scenes. Technically, SRNet consists of three components: a blended image generator, a reflection estimator and a reflection removal module. The image generator exploits the screen-blur combination to synthesize the training blended images. The reflection estimator learns the reflection layer and a blur degree that measures the level of blurriness for reflection. The reflection removal module further uses the blended image, blur degree and reflection layer to filter out the transmission layer in a cascaded manner. Superior results on three different SIRR methods are reported when generating the training data on the principle of the screen-blur combination. Moreover, extensive experiments on six datasets quantitatively and qualitatively demonstrate the efficacy of SRNet over the state-of-the-art methods. [ABSTRACT FROM AUTHOR]

At the heart of the debate about generative or autonomous AI is the concern that it could take action away from humans. Hannah Arendt, who gave the concept of action a political profile and opposed the automation tendencies of modernity, provides a basis for assessing fears that humans will cede their political action to AI. After an introduction to Arendt's political theory of action, the paper examines whether AI can and should act. The focus is on linguistic models. [ABSTRACT FROM AUTHOR]

Phase unwrapping (PU) is a critical processing step for obtaining information on land surface deformation from interferometric synthetic aperture radar (InSAR) images. Traditional PU methods take the phase continuity assumption as the precondition. However, in actual applications, there are many factors that can cause phase discontinuities, resulting in large errors in the PU results. With the fast development of deep learning, the data-driven deep learning methods for PU may help address this issue. Therefore, this study proposes a coherence-guided InSAR PU method with cycle-consistent adversarial networks. In this method, PU was considered a pixel-level regression problem from the interferogram to the unwrapped phase; cycle-consistent adversarial networks as one-step PU model were imported with the interferogram as the input and the unwrapped phase as the output. Except for adversarial loss and cycle consistency loss, based on the PU theory and the coherence of SAR images, the $\mathcal {L}_{1}$ loss with the weight of the coherence coefficient was added to guide the training process of networks. In addition to the traditional mean square error index, the root mean square value of the phase loop closure was introduced to evaluate the quality of the generated unwrapped phase. The results show that the proposed method can not only achieve the accuracy of the traditional PU method in the region with good coherence but also obtain better unwrapping results in the region with poor coherence, where the traditional PU method is restricted. It is also superior to the existing PU method with a conditional adversarial network. [ABSTRACT FROM AUTHOR]