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1. APPLYING NUMERICAL CONTROL TO ANALYZE THE PULL-IN STABILITY OF MEMS SYSTEMS.

Author

Yanni ZHANG, Yiman HAN, Xin ZHAO, Zhen ZHAO, and Jing PANG

Subjects
MICROELECTROMECHANICAL systems, PERIODIC motion, ENERGY harvesting, ENERGY consumption, SECURITY systems, NUMERICAL control of machine tools
Abstract

The micro-electro-mechanical system is widely used for energy harvesting and thermal wind sensor, its efficiency and reliability depend upon the pull-in instability. This paper studies a micro-electro-mechanical system using He-Liu [34] formulation for finding its frequency-amplitude relationship. The system periodic motion, pull-in instability and pseudo-periodic motion are discussed. This paper offers a new window for security monitoring of the system reliable operation. [ABSTRACT FROM AUTHOR]

Published
2024
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