1. METAL SEMICONDUCTOR METAL PHOTODETECTORS.
- Author
-
Harari, J. A., Vilcot, J. P., and Decoster, D. J.
- Subjects
DETECTORS ,LIGHT absorption ,ENERGY conversion ,SEMICONDUCTORS ,ELECTRIC currents ,ELECTRODES - Abstract
This article discusses various issues related to the metal-semiconductor-metal (MSM) photo-detectors. The MSM photo-detector is one of the solid-state photo-detectors fabricated on semiconductor slices. The general principle of photo-detection in semiconductor material is to collect electron-bole pairs that have been generated by light absorption. This two-terminal device converts optical power into an electric current. This basic photo-detector, which is mainly based on an inter digitated electrode structure, benefits from a simple fabrication process. It can offer a large photosensitive surface area and leads to high speed performance.
- Published
- 1999