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9 results on '"Ice, G.E."'

7. Spatially resolved characterization of electromigration-induced plastic deformation in al (0.5wt percent cu) interconnect

Author

Barabash, R.I., Ice, G.E., Tamura, N., Patel, J.R., Valek, B.C., Bravman, J.C., and Spolenak, R.

Subjects
Condensed Matter::Materials Science, X-ray microdiffraction stress thin films electromigration interconnect, Materials Sciences
Abstract

Electromigration during accelerated testing can induce large scale plastic deformation in Al interconnect lines as recently revealed by the white beam scanning X-ray microdiffraction. In the present paper, we provide a first quantitative analysis of the dislocation structure generated in individual micron-sized Al grains during an in-situ electromigration experiment. Laue reflections from individual interconnect grains show pronounced streaking after electric current flow. We demonstrate that the evolution of the dislocation structure during electromigration is highly inhomogeneous and results in the formation of unpaired randomly distributed dislocations as well as geometrically necessary dislocation boundaries. Approximately half of all unpaired dislocations are grouped within the walls. The misorientation created by each boundary and density of unpaired individual dislocations is determined.

Published
2003

8. Three-dimensional X-ray structural microscopy with submicrometre resolution.

Author

Larson, B.C., Wenge Yang, Ice, G.E., Budai, J.D., and Tischler, J.Z.

Subjects
X-ray microscopy, SYNCHROTRONS
Abstract

Describes the three-dimensional X-ray microscopy technique using polychromatic synchrotron X-ray microbeams to probe local crystal structure. Application of the technique to single-crystal, composite and functionally graded materials; Development of X-ray microscopy technique; Extraction of complete Laue diffraction patterns by using the technique.

Published
2002
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9. Synchrotron X-ray microdiffraction analysis of proton irradiated polycrystalline diamond films

Author

Newton, R.L., Davidson, J.L., Ice, G.E., and Liu, W.

Subjects
*MICROELECTROMECHANICAL systems, *THIN films, *ELECTROMAGNETIC waves, *MECHATRONICS, *SOLID state electronics
Abstract

Abstract: X-ray microdiffraction is a non-destructive technique that allows for depth-resolved, strain measurements with submicron spatial resolution. These capabilities make this technique promising for understanding the mechanical properties of MicroElectroMechancial Systems (MEMS). This investigation examined the local strain induced by irradiating a polycrystalline diamond thin film with a dose of 2×1017 H+/cm2 protons. Preliminary results indicate that a measurable strain, on the order of 10−3, was introduced into the film near the End of Range (EOR) region of the protons. [Copyright &y& Elsevier]

Published
2005
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