Search

Your search keyword '"*PLASMA etching"' showing total 1 results
1 results on '"*PLASMA etching"'

1. Asuka project to select tools this year.

Subjects
*BUSINESS enterprises, *PLASMA etching
Abstract

Discusses the outcome of the annual progress update meeting of Selete company in Tokyo, Japan in 2001. Plans of the Asuka Project researchers to select tools for the government's research fab in Tsukuba; Discussion on the plan of a Selete division for a node equipment and materials development; Update on the dry etching technology.

Published
2001

Catalog

Books, media, physical & digital resources
See catalog results