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In this work, the performance of AlGaN/ gallium nitride (GaN) high-electron mobility transistors (HEMTs) with different Fe doping tails was systematically investigated and compared. It is illustrated that the combination of the unintentionally doped (UID) GaN layer and a thinner Fe doping buffer layer would result in a faster slope rate of Fe concentration in the UID GaN layer. The devices with the fastest slope rate of Fe concentration in the UID GaN layer exhibited excellent large signal performance, including the saturated power density (${P}_{sat}$) of 9 W/mm and the power-added efficiency (PAE) of 65.6%. In addition, the ${P}_{sat}$ and the PAE of the device with the fastest slope rate of Fe concentration in UID GaN layer are 27.7% and 14.7%, which are higher than that of the device with the slowest slope rate of Fe concentration under the class AB operation conditions. Pulse ${I}$ ,– ${V}$ measurement results demonstrated that the buffer-related current collapse was more effectively suppressed in the 0.5- $\mu \text{m}$ Fe doping buffer layer because of faster slope rate of Fe concentration in UID GaN layer. Moreover, the frequency-dependent capacitance and conductance measurement results indicated that the current collapse was relevant to deep traps in the UID GaN layer introduced by Fe doping. By reducing the concentration of the deep traps caused by Fe doping, the device showed excellent characteristics of dc and RF. Furthermore, controlling the Fe doping tail was important for designing the GaN-based power amplifier with high ${P}_{sat}$ and PAE. [ABSTRACT FROM AUTHOR]

The submicrometer gate HEMT is fabricated with an ultrathin-barrier (UTB) AlGaN/gallium nitride (GaN) combined with in situ SiN passivation. The sheet resistance of the UTB Al0.2Ga0.8N (4 nm)/GaN heterostructure is effectively reduced by the SiNx passivation layer grown by metal organic chemical vapor deposition (MOCVD), from 6500 to $312~ \Omega $ /⬜. With the 20-nm stress-engineered in situ SiN, the device not only provides a large output current of 1.05 A/mm but also demonstrates promising potential on the RF applications, which gives AlGaN material two records high cutoff frequency ${f} _{\text {T}}/{f} _{\text {max}}$ of 157 GHz/334 GHz for 100-nm gated device and 211 GHz/379 GHz for 70-nm gated device. During the continuous wave (CW) power measurement at 30 GHz, the 70-nm devices exhibit a large output power of 4.6 W/mm associated with a peak power-added efficiency (PAE) of 48.1% and a gain of 11.6 dB (${V} _{\text {ds}} =20$ V), and a high PAE of 53.8% with an output power density of 1.9 W/mm and a gain of 10.8 dB (${V} _{\text {ds}} =10$ V), respectively. The huge potential of the UTB-AlGaN/GaN is demonstrated for high-frequency and large-output power applications when it is combined with the in situ SiN, which is necessary for future communication systems. [ABSTRACT FROM AUTHOR]

In order to further improve the electrical characteristics of AlGaN-buffer devices, we propose a new in situ SiN/AlGaN-sandwich-barrier (SWB)/GaN/Al0.05GaN high-electron mobility transistors (HEMTs). The dc, channel temperature, and RF temperature of the proposed AlGaN-buffer devices have been systematically studied and analyzed. The SWB structure can effectively reduce the peak value of the electric field, thus effectively reducing the self-heating effect and improving the breakdown characteristics. Through the channel temperature extraction method of pulsed IV and TCAD thermal simulation, the channel temperature of devices with different barrier structures is compared and analyzed, which proves that SWB structure can effectively reduce the channel temperature of devices. Due to the more obvious potential modulation effect between gate and drain, the ƒmax of device can improve more effectively with the increase of drain voltage. In addition, load-pull measurement at 10 GHz revealed that a saturated power density increased from 7.3 to 8.4 W/mm and an associated PAE increased from 24.9% to 29.4%. [ABSTRACT FROM AUTHOR]