1. Silicon cantilevers locally heated from 300K up to the melting point: temperature profile measurement from their resonances frequency shift
- Author
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Francisco Melo, Ludovic Bellon, Mickael Geitner, Felipe Aguilar, Basile Pottier, Laboratoire de Physique de l'ENS Lyon (Phys-ENS), École normale supérieure - Lyon (ENS Lyon)-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Centre National de la Recherche Scientifique (CNRS), Departamento de Ciencias Naturales y Tecnología, Universidad de Aysén, Universidad de Aysén, Departamento de Fisica [USACH Santiago], Universidad de Santiago de Chile [Santiago] (USACH), F.M. acknowledges ANID-Chile through Fondecyt project N0 1201013 and Fondequip 130149.F.A. ac- knowledges CONICYT through Fondecyt Postdoctorado N0 3160695, ANR-11-JS04-0012,HiResAFM,Mesures de force d'adhésion à haute résolution(2011), and École normale supérieure de Lyon (ENS de Lyon)-Université de Lyon-Centre National de la Recherche Scientifique (CNRS)
- Subjects
Cantilever ,Materials science ,Physics - Instrumentation and Detectors ,Silicon ,Field (physics) ,Phonon ,FOS: Physical sciences ,General Physics and Astronomy ,chemistry.chemical_element ,02 engineering and technology ,Physics - Classical Physics ,01 natural sciences ,0103 physical sciences ,Thermal ,[PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det] ,Elasticity (economics) ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,[PHYS.COND.CM-SM]Physics [physics]/Condensed Matter [cond-mat]/Statistical Mechanics [cond-mat.stat-mech] ,Absorption (electromagnetic radiation) ,Condensed Matter - Statistical Mechanics ,010302 applied physics ,[PHYS.MECA.VIBR]Physics [physics]/Mechanics [physics]/Vibrations [physics.class-ph] ,Condensed Matter - Materials Science ,Statistical Mechanics (cond-mat.stat-mech) ,Condensed matter physics ,Materials Science (cond-mat.mtrl-sci) ,Classical Physics (physics.class-ph) ,Resonance ,Instrumentation and Detectors (physics.ins-det) ,021001 nanoscience & nanotechnology ,chemistry ,[PHYS.MECA.THER]Physics [physics]/Mechanics [physics]/Thermics [physics.class-ph] ,[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] ,0210 nano-technology - Abstract
International audience; When heated, micro-resonators present a shift of their resonance frequencies. We study specifically silicon cantilevers heated locally by laser absorption, and evaluate theoretically and experimentally their temperature profile and its interplay with the mechanical resonances. We present a enhanced version of our earlier model [F. Aguilar Sandoval et al., J. Appl. Phys. 117, 234503 (2015)] including both elasticity and geometry temperature dependency, showing that the latter can account for 20% of the observed shift for the first flexural mode. The temperature profile description takes into account thermal clamping conditions, radiation at high temperature, and lower conductivity than bulk silicon due to phonon confinement. Thanks to a space-power equivalence in the heat equation, scanning the heating point along the cantilever directly reveals the temperature profile. Finally, frequency shift measurement can be used to infer the temperature field with a few percent precision.
- Published
- 2021
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