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1. Magnomechanics in suspended magnetic beams

Author

Kalle S. U. Kansanen, Camillo Tassi, Harshad Mishra, Mika A. Sillanpää, Tero T. Heikkilä, University of Jyväskylä, Quantum Nanomechanics, Centre of Excellence in Quantum Technology, QTF, Department of Applied Physics, Aalto-yliopisto, and Aalto University

Subjects
Quantum Physics, Condensed Matter - Mesoscale and Nanoscale Physics, FOS: Physical sciences, Physics::Optics, 02 engineering and technology, 021001 nanoscience & nanotechnology, magneettikentät, 01 natural sciences, tiiviin aineen fysiikka, 0103 physical sciences, Mesoscale and Nanoscale Physics (cond-mat.mes-hall), 010306 general physics, 0210 nano-technology, Quantum Physics (quant-ph), kvanttifysiikka
Abstract

Cavity optomechanical systems have become a popular playground for studies of controllable nonlinear interactions between light and motion. Owing to the large speed of light, realizing cavity optomechanics in the microwave frequency range requires cavities up to several mm in size, hence making it hard to embed several of them on the same chip. An alternative scheme with much smaller footprint is provided by magnomechanics, where the electromagnetic cavity is replaced by a magnet undergoing ferromagnetic resonance, and the optomechanical coupling originates from magnetic shape anisotropy. Here, we consider the magnomechanical interaction occurring in a suspended magnetic beam -- a scheme in which both magnetic and mechanical modes physically overlap and can also be driven individually. We show that a sizable interaction can be produced if the beam has some initial static deformation, as is often the case due to unequal strains in the constituent materials. We also show how the magnetism affects the magnetomotive detection of the vibrations, and how the magnomechanics interaction can be used in microwave signal amplification. Finally, we discuss experimental progress towards realizing the scheme., Comment: 17 pages, 10 figures; a few added paragraphs and several typographical errors corrected

Published
2021

2. Sensing Mechanism of Surface Acoustic Wave Magnetic Field Sensors Based on Ferromagnetic Films

Author

Omar Elmazria, Sami Hage-Ali, Tao Han, Harshad Mishra, Michel Hehn, Yang Yang, Shanghai Jiao Tong University [Shanghai], Institut Jean Lamour (IJL), and Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], Materials science, Acoustics and Ultrasonics, Condensed matter physics, 010401 analytical chemistry, Surface acoustic wave, sensing mechanism, Magnetostriction, magnetic field, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, 0104 chemical sciences, Magnetic field, Resonator, Ferromagnetism, Electric field, Solid mechanics, Electrical and Electronic Engineering, Electric current, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, Instrumentation
Abstract

International audience; Surface acoustic wave (SAW) sensors with ferromagnetic materials are used to measure magnetic fields or electric currents. The magnetic field sensitivities of SAW magnetic field sensors are essentially influenced by various factors. The sensing mechanism is complex due to the multiphysics coupling of the magnetic field, solid mechanics, and electric field. The magnetostriction effect, ΔE effect, and the third-order material constants are taken into consideration. The shape demagnetizing effect is reduced by increasing the lengthwidth ratio and length-height ratio of a ferromagnetic film on a SAW resonator. The model is verified by experiments and accurately predicts the magnetic field sensitivities of SAW resonant magnetic field sensors. The factors affecting the sensitivities are investigated from the perspective of the sensing mechanism. A grooved sensing surface structure is explored for an improved sensitivity. The results are beneficial to design reliable SAW magnetic field sensors with an enhanced sensitivity.

Published
2021
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3. Temperature compensated magnetic field sensor based on Love waves

Author

Prince Mengue, Omar Elmazria, Vincent Polewczyk, Karine Dumesnil, Harshad Mishra, Daniel Lacour, Sébastien Petit-Watelot, Sami Hage-Ali, Jeremy Streque, Abdelkrim Talbi, Michel Hehn, Sergei Zhgoon, Hamid M'Jahed, Aurelien Mazzamurro, Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), National Research University, Moscow Power Engineering Institute, Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS-IEMN), Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 (IEMN-DOAE), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France)-Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France), IMPACT N4S, ANR-15-IDEX-0004,LUE,Isite LUE(2015), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS - IEMN), and Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)

Subjects
Materials science, 02 engineering and technology, 01 natural sciences, 7. Clean energy, law.invention, Magnetization, symbols.namesake, Condensed Matter::Materials Science, [SPI]Engineering Sciences [physics], magnetic field sensor, law, 0103 physical sciences, General Materials Science, Electrical and Electronic Engineering, Rayleigh wave, temperature compensated, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Civil and Structural Engineering, 010302 applied physics, [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], Guided wave testing, Condensed matter physics, Acoustic wave, resonators, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Magnetic field, Love wave, Mechanics of Materials, Signal Processing, symbols, piezoelectric, 0210 nano-technology, SAW devices, Waveguide, Temperature coefficient, Love waves
Abstract

International audience; A temperature compensated magnetic field sensor based on the combination of CoFeB ferromagnetic thin films and Quartz/ZnO Love waveguide platform is developed and optimized. The Love wave is a shear horizontal guided wave and therefore provides an optimal interaction with magnetisation in the magneto-elastic thin film resulting in higher acoustic wave magneto-elastic coupling compared to the conventional Rayleigh wave based devices. ST-cut Quartz was chosen as substrate, ZnO as insulating layer for Love wave generation and temperature coefficient of frequency (TCF) compensation and CoFeB as the magnetostrictive layer sensitive to magnetic field. Experimental results show a magneto-acoustic sensitivity of 15.53 MHz/T with almost zero TCF.

Published
2020
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4. A Weak Form Nonlinear Model for Thermal Sensitivity of Love Wave Mode on Layered Structures

Author

Sami Hage-Ali, Tao Han, Qiaozhen Zhang, Yang Yang, Omar Elmazria, Harshad Mishra, Shanghai Jiao Tong University [Shanghai], Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), IMPACT N4S, ANR-15-IDEX-0004,LUE,Isite LUE(2015), and ANR-18-CE42-0004,SAWGOOD,Dispositifs sans fils étirables à ondes acoustiques de surface : vers des capteurs passifs multifonctionnels imprimés sur la peau(2018)

Subjects
[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], Materials science, Acoustics and Ultrasonics, Interdigital transducer, Love wave, Constitutive equation, Mechanics, thermal sensitivity, frequency temperature characteristic, 01 natural sciences, Piezoelectricity, Stress (mechanics), Resonator, Nonlinear system, 0103 physical sciences, Boundary value problem, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 010301 acoustics, Instrumentation, third-order constants
Abstract

A precise theoretical model for the thermal sensitivity of Love wave mode is significant in the structure design, temperature compensation, and the prediction of thermal behavior. This article proposes a weak form nonlinear model to calculate the thermal sensitivity of Love waves on arbitrary layered structures. The third-order material constants, as well as the thermal stress and strain tensors between the substrate, electrodes, and wave-guiding layer, are considered in the model. The $9 \times 9$ effective elastic and the $3 \times 9$ effective piezoelectric matrixes are imported into the nonlinear constitutive equations and boundary conditions using weak form expressions. A temperature-compensated Love wave mode resonator on a layered ZnO/interdigital transducer (IDT)/quartz structure is obtained. The theoretical model is verified through the comparison of experimental and analytical results. The model is beneficial for the design of Love wave devices and sensors.

Published
2020
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5. Intrinsic versus shape anisotropy in micro-structured magnetostrictive thin films for magnetic surface acoustic wave sensors

Author

Omar Elmazria, Nicolas Tiercelin, Karine Dumesnil, Sami Hage-Ali, Vincent Polewczyk, Olivier Bou Matar, Abdelkrim Talbi, Sebastien Petit Watelot, Michel Hehn, Hamid M'Jahed, Harshad Mishra, Daniel Lacour, Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Laboratoire International associé sur les phénomènes Critiques et Supercritiques en électronique fonctionnelle, acoustique et fluidique (LIA LICS/LEMAC), Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS-IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), IMPACT N4S, ANR-15-IDEX-0004,LUE,Isite LUE(2015), Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520 (IEMN), Centre National de la Recherche Scientifique (CNRS)-Université de Lille-Université Polytechnique Hauts-de-France (UPHF)-Ecole Centrale de Lille-Université Polytechnique Hauts-de-France (UPHF)-Institut supérieur de l'électronique et du numérique (ISEN), ANR-15-IDEX-04-LUE,LUE,Lorraine Université d'Excellence(2016), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS - IEMN), Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 (IEMN-DOAE), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France)-Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), and Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France)

Subjects
Materials science, magnetic, micromagnetics, 02 engineering and technology, 01 natural sciences, 0103 physical sciences, General Materials Science, Electrical and Electronic Engineering, Anisotropy, saw sensors, Civil and Structural Engineering, 010302 applied physics, Condensed matter physics, Surface acoustic wave, Magnetostriction, Acoustic wave, 021001 nanoscience & nanotechnology, Condensed Matter Physics, micro-structured thin films, Atomic and Molecular Physics, and Optics, Magnetic field, Magnetic anisotropy, Mechanics of Materials, Magnet, Signal Processing, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Surface acoustic wave sensor, 0210 nano-technology, shape-effects
Abstract

International audience; This work aims at studying the interaction between surface acoustic waves (SAW) and micro-structured magnetostrictive layers under a magnetic field with a perspective to develop magnetic field sensors. The impact of the competition between the strong intrinsic magnetic anisotropy of the magnetic material and the shape anisotropy of the interdigitated transducer (IDT) fingers introduced by the micro-structuration is investigated. Therefore, the macroscopic and microscopic magnetic properties of the IDT and their influence on the magneto-acoustic response are studied. A SAW resonator with the IDTs made of the magnetostrictive thin film was elaborated and the magnetic surface acoustic wave (MSAW) response under a magnetic field was performed and discussed. Depending on the energy balance, the anisotropy gets modified and a correlation with the MSAW sensitivity to an externally applied magnetic field is made.

Published
2019
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6. AlN/ZnO/LiNbO 3 Packageless Structure as a Low-Profile Sensor for Potential On-Body Applications

Author

M. Moutaouekkil, Florian Bartoli, Omar Elmazria, Cecile Floer, Olivier Bou Matar, Philippe Pigeat, Sami Hage-Ali, Sergei Zhgoon, Harshad Mishra, Thierry Aubert, Abdelkrim Talbi, Stefan Mc Murtry, Institut Jean Lamour (IJL), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), National Research University, Moscow Power Engineering Institute, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS-IEMN), Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 (IEMN-DOAE), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France)-Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France), IMPACT N4S, ANR-15-IDEX-0004,LUE,Isite LUE(2015), ANR-18-CE42-0004,SAWGOOD,Dispositifs sans fils étirables à ondes acoustiques de surface : vers des capteurs passifs multifonctionnels imprimés sur la peau(2018), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS - IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), ACKNOWLEDGMENTThe authors would like to thank L. Badie, G. Lengaigne, and F. Montaigne from Minalor platform, Institut Jean Lamour, Nancy, France, for their help in the microfabrication., and This work was supported in part by the Direction Générale de l’Armement, in part by the Région Grand-Est, in part by the European funds FEDER, in part by the French PIA project 'Lorraine Université d’Excellence' under Grant ANR-15-IDEX-04-LUE, and in part by the Ministry of Science and Education of Russian Federation under Grant 8.6108.2017/6.7.

Subjects
Materials science, Acoustics and Ultrasonics, Temperature sensing, Acoustics, Lithium niobate, Structure (category theory), 02 engineering and technology, Particle displacement, Acoustic wave, 021001 nanoscience & nanotechnology, 01 natural sciences, Condensed Matter::Materials Science, chemistry.chemical_compound, symbols.namesake, chemistry, 0103 physical sciences, symbols, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Surface acoustic wave sensor, Electrical and Electronic Engineering, Rayleigh wave, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, 010301 acoustics, Instrumentation
Abstract

International audience; Surface acoustic wave (SAW) sensors find their application in a growing number of fields. This interest stems in particular from their passive nature and the possibility of remote interrogation. Still, the sensor package, due to its size, remains an obstacle for some applications. In this regard, packageless solutions are very promising. This paper describes the potential of the AlN/ZnO/LiNbO3 structure for packageless acoustic wave sensors. This structure, based on the waveguided acoustic wave principle, is studied numerically and experimentally. According to the COMSOL simulations, a wave, whose particle displacement is similar to a Rayleigh wave, is confined within the structure when the AlN film is thick enough. This result is confirmed by comprehensive experimental tests, thus proving the potential of this structure for packageless applications, notably temperature sensing. Index Terms-Surface acoustic wave SAW, temperature sensor, waveguiding layer acoustic wave WLAW, packageless, low-profile.

Published
2018
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7. Diamond/ZnO/LiNbO3 structure for packageless acoustic wave sensors

Author

Cecile Floer, Fabien Benedic, Sergei Zhgoon, Abdelkrim Talbi, Olivier Bou Matar, Florian Bartoli, Thierry Aubert, Mohammed Moutaouekkil, Harshad Mishra, Stefan McMurtry, Sami Hage-Ali, Omar Elmazria, Damia Dekkar, Benoit Baudrillart, Institut Jean Lamour (IJL), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS - IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Laboratoire des Sciences des Procédés et des Matériaux (LSPM), Université Paris 13 (UP13)-Institut Galilée-Université Sorbonne Paris Cité (USPC)-Centre National de la Recherche Scientifique (CNRS), National Research University, Moscow Power Engineering Institute, ANR-15-IDEX-0004,LUE,Isite LUE(2015), Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS-IEMN), Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 (IEMN-DOAE), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France)-Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France), Institut Jean Lamour ( IJL ), Université de Lorraine ( UL ) -Centre National de la Recherche Scientifique ( CNRS ), Laboratoire Matériaux Optiques, Photonique et Systèmes ( LMOPS ), CentraleSupélec-Université de Lorraine ( UL ), Institut d’Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520 ( IEMN ), Ecole Centrale de Lille-Institut supérieur de l'électronique et du nunérique (ISEN)-Université de Valenciennes et du Hainaut-Cambresis ( UVHC ) -Université de Lille-Centre National de la Recherche Scientifique ( CNRS ), Laboratoire des Sciences des Procédés et des Matériaux ( LSPM ), Université Paris 13 ( UP13 ) -Université Sorbonne Paris Cité ( USPC ) -Institut Galilée-Centre National de la Recherche Scientifique ( CNRS ), ANR-15-IDEX-04-LUE,LUE,Lorraine Université d'Excellence ( 2016 ), and Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Materials science, business.industry, Surface acoustic wave, [ SPI.MAT ] Engineering Sciences [physics]/Materials, packageless sensor, [ PHYS.COND.CM-MS ] Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Diamond, Nanocrystalline diamond, 02 engineering and technology, Acoustic wave, engineering.material, 021001 nanoscience & nanotechnology, 01 natural sciences, [SPI.MAT]Engineering Sciences [physics]/Materials, waveguiding layer acoustic wave, diamond, 0103 physical sciences, engineering, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, [ SPI.NANO ] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, business, 010301 acoustics
Abstract

International audience; —This paper studies the Diamond/ZnO/LiNbO3 structure, numerically and experimentally, as a candidate for a packageless sensor based on the surface acoustic wave technology. The structure is compared with an AlN/ZnO/LiNbO3 structure, in order to highlight better performances of diamond with respect to AlN. Early experimental results of nanocrystalline diamond growth on ZnO/Si are presented.

Published
2017
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8. AlN/ZnO/LiNbO3 packageless structure as a low-profile sensor for on-body applications

Author

Olivier Bou Matar, Stefan Mc Murtry, Thierry Aubert, M. Moutaouekkil, Abdelkrim Talbi, Cecile Floer, Omar Elmazria, Sami Hage-Ali, Florian Bartoli, Sergei Zhgoon, Harshad Mishra, Philippe Pigeat, Institut Jean Lamour (IJL), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), National Research University, Moscow Power Engineering Institute, Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS-IEMN), Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 (IEMN-DOAE), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France)-Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France), Université de Lorraine (UL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), and Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS - IEMN)

Subjects
010302 applied physics, Materials science, business.industry, Surface acoustic wave, 02 engineering and technology, Acoustic wave, Conformable matrix, 021001 nanoscience & nanotechnology, 01 natural sciences, Resonator, 0103 physical sciences, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, Wireless, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, business, Layer (electronics), ComputingMilieux_MISCELLANEOUS
Abstract

Surface acoustic wave (SAW) devices are widely used as filters or resonators for mobile communications or radars applications. However, the velocity of the wave can be very sensitive to physical parameters of the environment (temperature, strain…), which allows the device to be used as a sensor. SAW devices are passive (batteryless) and wireless, but are often bulky due to the package. To dramatically reduces their profile, it is possible to use a Wave-guiding Layer Acoustic Wave (WLAW) structure, which consists of a low velocity layer between two higher velocity layers. These structures have the potential to be ultra-thin and conformable and thus could be used for flexible on-body biomedical applications. This work investigates the AlN/ZnO/LiNbO 3 structure as a candidate for a WLAW temperature sensor.

Published
2017

9. Temperature compensated magnetic field sensor based on love waves.

Author

Harshad Mishra, Jérémy Streque, Michel Hehn, Prince Mengue, Hamid M’Jahed, Daniel Lacour, Karine Dumesnil, Sébastien Petit-Watelot, Sergei Zhgoon, Vincent Polewczyk, Aurélien Mazzamurro, Abdelkrim Talbi, Sami Hage-Ali, and Omar Elmazria

Abstract

A temperature compensated magnetic field sensor based on the combination of CoFeB ferromagnetic thin films and Quartz/ZnO Love waveguide platform is developed and optimized. The Love wave is a shear horizontal guided wave and therefore provides an optimal interaction with magnetization in the magneto-elastic thin film resulting in higher acoustic wave magneto-elastic coupling compared to the conventional Rayleigh wave based devices. ST-cut Quartz was chosen as substrate, ZnO as insulating layer for Love wave generation and temperature coefficient of frequency (TCF) compensation and CoFeB as the magnetostrictive layer sensitive to magnetic field. Experimental results show a magneto-acoustic sensitivity of 15.53 MHz T−1 with almost zero TCF. [ABSTRACT FROM AUTHOR]

Published
2020
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10. Intrinsic versus shape anisotropy in micro-structured magnetostrictive thin films for magnetic surface acoustic wave sensors.

Author

Harshad Mishra, Michel Hehn, Daniel Lacour, Omar Elmazria, Nicolas Tiercelin, Hamid Mjahed, Karine Dumesnil, Sebastien Petit Watelot, Vincent Polewczyk, Abdelkrim Talbi, Olivier Bou Matar, and Sami Hage-Ali

Abstract

This work aims at studying the interaction between surface acoustic waves (SAW) and micro-structured magnetostrictive layers under a magnetic field with a perspective to develop magnetic field sensors. The impact of the competition between the strong intrinsic magnetic anisotropy of the magnetic material and the shape anisotropy of the interdigitated transducer (IDT) fingers introduced by the micro-structuration is investigated. Therefore, the macroscopic and microscopic magnetic properties of the IDT and their influence on the magneto-acoustic response are studied. A SAW resonator with the IDTs made of the magnetostrictive thin film was elaborated and the magnetic surface acoustic wave (MSAW) response under a magnetic field was performed and discussed. Depending on the energy balance, the anisotropy gets modified and a correlation with the MSAW sensitivity to an externally applied magnetic field is made. [ABSTRACT FROM AUTHOR]

Published
2019
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