10 results on '"Huebner, Joerg"'
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2. DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process
3. Three-dimensional nanometrology of microstructures by replica molding and large-range atomic force microscopy
4. Functionality of novel black silicon based nanostructured surfaces studied by TOF SIMS
5. Sloped side walls in SU-8 structures with ‘Step-and-Flash’ processing
6. Integration of waveguides for optical detection in microfabricated analytical devices.
7. Strong Bragg gratings in nonsensitized low-loss planar waveguides as building blocks for WDM network components.
8. Phenomenological model of UV-induced Bragg grating growth in germanosilicate fibers.
9. Novel type of highly photosensitive germanium-doped silica glass: codoping with nitrogen.
10. UV-written Y-splitter in Ge-doped silica.
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