1. Adsorption Characteristics of Organic Long Chain Molecules During Physical Vapor Deposition
- Author
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Hui-Li Shao, Norimasa Okui, Atsushi Kubono, Norihiko Yuasa, and Susumu Umemoto
- Subjects
Chemistry ,General Physics and Astronomy ,Surfaces and Interfaces ,General Chemistry ,Polymer adsorption ,Chemical vapor deposition ,Quartz crystal microbalance ,Condensed Matter Physics ,Surfaces, Coatings and Films ,Adsorption ,Physisorption ,Chemisorption ,Physical vapor deposition ,Physical chemistry ,Thin film - Abstract
The adsorption processes in physical vapor deposition (PVD) and alternating vapor deposition polymerization (AVDP) of organic compounds are analyzed to estimate the parameters associated with the adsorption characteristics. Observation by a simple technique using a precisely tuned quartz crystal microbalance (QCM) reveals that the first stage in the thin film formation comprises two types of adsorption, namely physisorption and chemisorption. A modified model for physisorption involving free and metastable states is proposed for the analysis of the physisorption behavior in order to estimate the average lifetime and the adsorption energy of molecules on the substrate.
- Published
- 2002