Search

Evidence of microscopic inhomogeneities of the side source/drain contacts in 300 mm wafer integrated MoS2 field-effect transistors is presented. In particular, the presence of a limited number of low Schottky barrier spots through which channel carriers are predominantly injected is demonstrated by the dramatic current changes induced by individual charge traps located near the source contact. Two distinct types of "contact-impacting traps" are identified. Type-1 trap is adjacent to the contact interface and exchanges carriers with the metal. Its impact is only observable when the adjacent contact is the reverse-biased FET source and limits the channel current. Type-2 trap is located in the AlOx gate oxide interlayer, near the source contact, and exchanges carriers with the channel. Its capture/emission time constants exhibit both a gate and drain bias dependence due to the high sensitivity of the contact regions to the applied lateral and vertical fields. Unlike typical channel-impacting oxide traps, both types of reported defects affect the Schottky barrier height and width rather than the threshold voltage and result in giant random telegraph noise (RTN). These observations indicate that the contact quality and geometry play a fundamental role in the ultimate scaling of 2D FETs. [ABSTRACT FROM AUTHOR]

The reliability and durability of integrated circuits (ICs), present in almost every electronic system, from consumer electronics to the automotive or aerospace industries, have been and will continue to be critical concerns for IC chip makers, especially in scaled nanometer technologies. In this context, ICs are expected to deliver optimal performance and reliability throughout their projected lifetime. However, real-time reliability assessment and remaining lifetime projections during in-field IC operation remain unknown due to the absence of trustworthy on-chip reliability monitors. The integration of such on-chip monitors has recently gained significant importance because they can provide real-time IC reliability extraction by exploiting the fundamental physics of two of the major reliability degradation phenomena: bias temperature instability (BTI) and hot carrier degradation (HCD). In this work, we present an extensive study of ring oscillator (RO)-based degradation and annealing monitors designed on our latest 28 nm versatile array chip. This test vehicle, along with a dedicated test setup, enabled the reliable statistical characterization of BTI- and HCD-stressed as well as annealed RO monitor circuits. The versatility of the test vehicle presented in this work permits the execution of accelerated degradation tests together with annealing experiments conducted on RO-based reliability monitor circuits. From these experiments, we have constructed precise annealing maps that provide detailed insights into the annealing behavior of our monitors as a function of temperature and time, ultimately revealing the usage history of the IC. [ABSTRACT FROM AUTHOR]

We develop a compact physics model for hot-carrier degradation (HCD) that is valid over a wide range of gate and drain voltages ( V gs  and  V ds , respectively). Special attention is paid to the contribution of secondary carriers (generated by impact ionization) to HCD, which was shown to be significant under stress conditions with low  V gs  and relatively high  V ds . Implementation of this contribution is based on refined modeling of carrier transport for both primary and secondary carriers. To validate the model, we employ foundry-quality n-channel transistors and a broad range of stress voltages  { V gs , V ds } . [ABSTRACT FROM AUTHOR]

We study how nitridation, applied to SiON gate layers, impacts the reliability of planar metal-oxide-semiconductor field effect transistors (MOSFETs) subjected to negative and positive bias temperature instability (N/PBTI) as well as hard breakdown (HBD) characteristics of these devices. Experimental data demonstrate that p-channel transistors with SiON layers characterized by a higher nitrogen concentration have poorer NBTI reliability compared to their counterparts with a lower nitrogen content, while PBTI in n-channel devices is negligibly weak in all samples independently of the nitrogen concentration. The Weibull distribution of HBD fields extracted from experimental data in devices with a higher N density are shifted towards lower values with respect to that measured in MOSFETs, and SiON films have a lower nitrogen concentration. Based on these findings, we conclude that a higher nitrogen concentration results in the aggravation of BTI robustness and HBD characteristics. [ABSTRACT FROM AUTHOR]

Cryogenic semiconductor device models are essential in designing control systems for quantum devices and in benchmarking the benefits of cryogenic cooling for high-performance computing. In particular, the saturation of subthreshold swing due to band tails is an important phenomenon to include in low-temperature analytical MOSFET models as it predicts theoretical lower bounds on the leakage power and supply voltage in tailored cryogenic CMOS technologies with tuned threshold voltages. Previous physics-based modeling required to evaluate functions with no closed-form solutions, defeating the purpose of fast and efficient model evaluation. Thus far, only the empirically proposed expressions are in closed form. This article bridges this gap by deriving a physics-based and closed-form model for the full saturating trend of the subthreshold swing from room down to low temperature. The proposed model is compared against experimental data taken on some long and short devices from a commercial 28-nm bulk CMOS technology down to 4.2 K. [ABSTRACT FROM AUTHOR]

The choice of the ideal material employed in selector devices is a tough task both from the theoretical and experimental side, especially due to the lack of a synergistic approach between techniques able to correlate specific material properties with device characteristics. Using a material‐to‐device multiscale technique, a reliable protocol for an efficient characterization of the active traps in amorphous GeSe chalcogenide is proposed. The resulting trap maps trace back the specific features of materials responsible for the measured findings, and connect them to an atomistic description of the sample. The metrological approach can be straightforwardly extended to other materials and devices, which is very beneficial for an efficient material‐device codesign and the optimization of novel technologies. [ABSTRACT FROM AUTHOR]

Vertical, gigapascal-level mechanical stress (MS) is induced at different locations along the channel of 40-nm effective gate length planar CMOS field-effect transistor (FET) devices and electrical parameter variations are investigated. In both p-and n-channel devices, the threshold voltage, mobility, and ON-current are seen to change proportionally with the additional MS, while gate-induced drain-leakage current increases exponentially. A clear effect of the location of the applied force along the source–drain direction is observed on the transistor parameters. Simulations show that a mechanical load located closer to the FET source induces a stronger asymmetry between the source and drain stresses. This leads to asymmetric subband splitting/warping, which reduces the backscattering rate at the source, in line with theoretical predictions on the importance of the channel barrier near the source for current in quasi-ballistic transistors. [ABSTRACT FROM AUTHOR]

Using the framework developed in the first part of this work, we demonstrate the capabilities of the extended two-state nonradiative multi-phonon (NMP) model by reproducing leakage current characteristics of two selected technologies. First, we identify the temperature-activated leakage mechanism in SiC / SiO2 stacks using a tens of nanometer thick thermally grown oxide as trap-assisted tunneling (TAT) through defects. Interestingly, this effect can be reproduced with the same parameters in a SiC / SiO2 stack with deposited oxide. Our simulations demonstrate that these charge transition centers are distributed within only a few nanometers from the SiC / SiO2 interface. The low thermal activation of the leakage current is linked to the low relaxation energies of the involved traps compared with those typically involved in bias temperature instability (BTI) and Random Telegraph Noise (RTN). Second, a similar mechanism can explain TAT characteristics and transient charge trapping currents in Metal–Insulator–Metal (MIM) capacitors with a ZrO2 insulating layer. By comparison of our model parameters to theoretical density functional theory (DFT) calculations, we identify self-trapped electrons (polarons) as a likely cause for these effects, as they have the required low relaxation energies. [ABSTRACT FROM AUTHOR]

Due to the potential for technological application, there has been an explosion of interest in heavily polycrystalline ferroelectric nanofilms, such as those of doped hafnium oxide. However, the heavily polycrystalline nature of these materials invalidates conventional modeling approaches as the dynamics have been found to be: 1) nucleation-limited; 2) involve grains of ferroelectric material interspersed among grains of alternative, nonferroelectric material; and 3) the direct interaction between these grains is observed to be minimal. In this article, we consider seven separate compact or “0-D” models of such polycrystalline films. Four of these models are based on a Landau paradigm and two are based on a Monte Carlo (MC) paradigm. The seventh is the traditional Preisach model. Although all of these models have been used in the literature to model novel polycrystalline ferroelectric nanofilms, here we compare and contrast the accuracy and physical appropriateness of each model by comparing both their static and dynamic properties against experimental data. We then find that although all models except single-grain models are capable of reproducing the static properties, only the MC models replicate the long-time dynamical properties. Thus, it is demonstrated that not all models are equally valid for the accurate modeling of such films. [ABSTRACT FROM AUTHOR]

The time-dependent dielectric breakdown in thin gate oxides is studied and a new methodology is proposed that is applicable to a wide range of gate stacks for extracting soft breakdown (SBD) and post-SBD wear-out (WO) parameters from measuring the time to hard breakdown ([t.sub.HBD) only. A new complete reliability prediction model is proposed that has included SBD and WO.

The article presents various different techniques that can be employed for the evaluation of the threshold voltage shift induced by the negative bias temperature instability (NBTI). The effects of sensing and recovery are shown to be the major factors that need to be considered during the process of voltage evaluation.

Several stress and recovery experiments are conducted to explain the mechanisms that are shown to initiate the negative bias temperature instability (NBTI) in the pMOS transistors. Generation of defects near the silicon/silicon dioxide interface and hole trapping in the oxide are shown to be the two main mechanisms imvolved in the generation of NBTI.

In this study, the radiation effects of electron beam (e‐beam) on field‐effect transistors (FETs) using transition‐metal dichalcogenides (TMD) as a channel are carefully investigated. Electron‐hole pairs (EHPs) in SiO2 generated by e‐beam irradiation induce additional traps, which change the surface potential of the TMD channel, resulting in strong negative shifts of transfer characteristics. These negative shifts, which remind one of n‐doping effects, are highly affected not only by the condition of e‐beam irradiation, but also by the gate bias condition during irradiating. As a result of the e‐beam irradiation effect, band bending and contact resistance are affected, and the degree of formation of oxide traps and interface traps varies depending on the gate bias conditions. In the case of VG > 0 V application during e‐beam irradiation, the negative shifts in the transfer characteristics are fully recovered after ambient exposure. However, the interface traps increase significantly, resulting in variations of low‐frequency (LF) noise and time‐dependent current fluctuations. [ABSTRACT FROM AUTHOR]

Sequential 3-D stacking of multiple CMOS device tiers in a single fabrication flow requires the development of reliable high- ${k}$ /metal gate (HKMG) stacks at a reduced thermal budget (<525 °C). The omission of the customary high-temperature gate-stack annealing results in excessive dielectric defect densities. We have recently demonstrated on MOS capacitors the insertion of “defect decoupling” layers–LaSiOx for nMOS and Al2O3 for pMOS–at the interface between SiO2 and HfO2 as a promising approach to engineer the high- ${k}$ band lineup and minimize charge trapping for improved bias-temperature-instability (BTI) reliability. In this article, we demonstrate this approach in planar transistors, which allows assessing the impact of defect decoupling on carrier mobility. First, a comparative study on the impact of LaSiOx and Al2O3 insertion is performed, highlighting the different strategies for improving positive BTI (PBTI) and negative BTI (NBTI) reliability. Second, a comprehensive investigation on the effects of LaSiOx and Al2O3 insertion is conducted with a focus on BTI reliability and channel carrier mobility: a lack of penalty (Al2O3) or even improved carrier mobility (LaSiOx) is reported for the dipole-inserted gate stacks. Furthermore, we explore the simplified dual gate-stack integration for CMOS flow. A severe PBTI reliability penalty is observed if an Al2O3 layer (for hole trap decoupling) is deposited in the nMOS gate-stack, even if on top of the beneficial LaSiOx (for electron trap decoupling). In contrast, the pMOS gate-stack is found to be more tolerant to the presence of a residual LaSiOx layer on top of the beneficial Al2O3 layer, suggesting a viable strategy for the simplified dual gate-stack integration. Finally, the reliability improvement is validated also on a FinFET test vehicle. [ABSTRACT FROM AUTHOR]

The impact of strain on negative bias temperature instability (NBTI) is assessed by studying devices with polycrystalline-Si/SiON as well as deposited metal gate/high-[kappa] and FUSI/high-[kappa] gate stacks. The studies have shown that there is no degradation of intrinsic NBTI behavior due to process-induced strain.

The design and verification of a theory of the current-ratio (CR) technique in uniform semiconductors, which is widely used to locate gate oxide breakdown (BD) spots in one dimension, is reported. The newly developed technique could be used to interpret BD-spot distributions in 2-D to better predict gate oxide reliability.

We present new original experimental results on the effects produced by single heavy-ion strikes on minimum-size MOSFETs manufactured in a 0.1-[micro]m CMOS technology. We show that, whereas large-width samples do not suffer from any particular degradation when struck by a single ion, minimum size devices, which are the real building block of modern digital circuits, display small but significant changes in the electrical characteristics. In particular, we identify and classify the different types of degradation occurring after irradiation with high-LET particles and attribute them to ion strikes occurring in different parts of the MOSFET: gate oxide, LDD spacers, and STI. Even though the observed changes do not compromise the device functionality, they clearly indicate that, as the feature size is scaled into the decananometer range, single heavy-ion strikes will have a growing effect on digital circuits. Index Terms--CMOS, heavy ions.

Charge trapping is arguably the most important detrimental mechanism distorting the ideal characteristics of MOS transistors, and nonradiative multiphonon (NMP) models have been demonstrated to provide a very accurate description. For the calculation of the NMP rates at room temperature or above, simple semiclassical approximations have been successfully used to describe this intricate mechanism. However, for the computation of charge transition rates at cryogenic temperatures, it is necessary to use the full quantum mechanical description based on Fermi’s golden rule. Since this is computationally expensive and often not feasible, we discuss an efficient method based on the Wentzel–Kramers–Brillouin (WKB) approximation in combination with the saddle point method and benchmark this approximation against the full model. We show that the approximation delivers excellent results and can, hence, be used to model charge trapping behavior at cryogenic temperatures. [ABSTRACT FROM AUTHOR]

We present time-zero characterization and an investigation on bias temperature instability (BTI) degradation between 4 and 300 K on large area high- ${k}$ CMOS devices. Our measurements show that negative BTI (NBTI) on pMOSFETs freezes out when approaching cryogenic temperatures, whereas there is still significant positive BTI (PBTI) degradation in nMOSFETs even at 4 K. To explain this behavior, we use an efficient implementation of the quantum mechanical nonradiative multiphonon charge trapping model presented in Part I and extract two separate trap bands in the SiO2 and HfO2 layer. We show that NBTI is dominated by defects in the SiO2 layer, whereas PBTI arises mainly from defects in the HfO2 layer, which are weakly recoverable and do not freeze out at low temperatures due to dominant nuclear tunneling at the defect site. [ABSTRACT FROM AUTHOR]

The influence of field-effect transistor (FET) gate oxide breakdown on the performance of a ring oscillator circuit is studied using statistical tools, emission microscopy and circuit analysis. It is further demonstrated that many hard breakdowns can occur in this circuit without affecting its overall function.

A consistent picture for field-effect transistors (nFET) with hard gate oxide breakdown is proposed and supported by MEDICI and SPICE simulations. The circuit proposed could be used for determining how strongly gate oxide breakdown affects both digital and analog circuit operation.

Hot-carrier-induced degradation of short p-channel field-effect transistors in the presence of externally applied vertical mechanical force is investigated. The mechanical stress was induced in the devices by applying a normal load with a nanoindenter. Using finite element modeling, the induced stress to the channel was estimated to reach GPa range. It is shown that compressive mechanical stress considerably enhances the impact ionization rate and the generation of secondary electron-hole pairs. These can be trapped in the gate oxide and cause a hot-electron-induced punch-through effect and effective p-channel length reduction even after both mechanical and electrical stresses are removed. The presented findings indicate the importance of mechanical stress control and engineering for improving the device reliability. [ABSTRACT FROM AUTHOR]

Field‐effect transistors (FETs), using transition metal dichalcogenides (TMD) as channels, have various types of interfaces, and their characteristics are sensitively changed in temperature and electrical stress. In this article, the effect of fast cyclic thermal stress on the performance of FETs using TMD as a channel is investigated and introduced. The Al2O3 passivation layer is deposited onto the TMD channel by atomic layer deposition process, and the hysteresis decreases and the direction changes from clockwise to counterclockwise. Applying cyclic thermal stress that rapidly heats and cools by 90 K in a 20 s cycle increases and decreases drain current repeatedly as charges move between the TMD channel and the interface traps. As cyclic thermal stress is applied, permanent interfacial damage occurs, resulting in increased interface trap density at the bottom and decreased hysteresis. These experimental results are also shown through technology computer‐aided design simulations. In addition, series resistance and mobility attenuation factor increase due to the concentration of the conduction paths at the bottom of the channel. [ABSTRACT FROM AUTHOR]

A comprehensive investigation on the hot-carrier-induced interface state generation and its impact on carrier mobility in nMOSFET is performed. I – V compact modeling and charge pumping (CP) characterization are used as independent ways to evaluate the interface state density as a function of hot-carrier-induced aging. From the two techniques, similar power-law time exponents of the interface state density kinetics are obtained. Assisted by the quasi-spectroscopic (temperature-resolved) CP measurement, the extracted interface state density is further correlated with the I – V modeling results: an universal mobility degradation normalization parameter Nit,ref = ~ 4.1 × 1011/cm2 is reported, irrespective of the effective oxide thickness (EOT), stress temperature, or the relative degradation of the device under test (DUT). Supported by the fundamental principles deployed in the derivation and the broad range of experimental conditions considered for its validation, the reported normalization parameter could serve as a modeling constant in the commonly used I – V compact models to correlate the mobility degradation with the interface state density induced by hot carrier stress. [ABSTRACT FROM AUTHOR]

In this study, high‐performance few‐layered ReS2 field‐effect transistors (FETs), fabricated with hexagonal boron nitride (h‐BN) as top/bottom dual gate dielectrics, are presented. The performance of h‐BN dual gated ReS2 FET having a trade‐off of performance parameters is optimized using a compact model from analytical choice maps, which consists of three regions with different electrical characteristics. The bottom h‐BN dielectric has almost no defects and provides a physical distance between the traps in the SiO2 and the carriers in the ReS2 channel. Using a compact analyzing model and structural advantages, an excellent and optimized performance is introduced consisting of h‐BN dual‐gated ReS2 with a high mobility of 46.1 cm2 V−1 s−1, a high current on/off ratio of ≈106, a subthreshold swing of 2.7 V dec−1, and a low effective interface trap density (Nt,eff) of 7.85 × 1010 cm−2 eV−1 at a small operating voltage (<3 V). These phenomena are demonstrated through not only a fundamental current–voltage analysis, but also technology computer aided design simulations, time‐dependent current, and low‐frequency noise analysis. In addition, a simple method is introduced to extract the interlayer resistance of ReS2 channel through Y‐function method as a function of constant top gate bias. [ABSTRACT FROM AUTHOR]

We report measurements of multiple hot-carrier (HC) stress and high-temperature anneal cycles repeated on the same nFETs fabricated in a commercial 40-nm bulk CMOS technology. We model this cycled HC degradation anneal assuming Si–H bond breakage during stress and bond passivation during anneal, with the bond dissociation and passivation energies following a bivariate Gaussian distribution. Our model can describe multiple stress and anneal time scenarios well using a single parameter set and provides insights into the recovery behavior of HC-induced defects. We find no correlation between bond dissociation and passivation energies and observe that the repeated HC stress and anneal cycles suppress the low energies from the distribution of bond passivation energies, changing its shape from the Gaussian to a non-Gaussian form. [ABSTRACT FROM AUTHOR]

Low thermal budget junction-less transistors with back-gate are fabricated as top-tier devices for 3-D sequential integration. The impact of back-gate bias on carrier mobility and bias temperature instability (BTI) reliability is investigated. The back-gate bias is shown to modulate the carrier mobility: specifically, mobility is increased under forward back-gate bias (FBB), which is ascribed to the carrier redistribution from the front-gate interface toward back-gate interface. Regarding BTI reliability, if a back-gate bias (VBG) is applied only during ON-state and a constant front-gate stress VG is used, BTI reliability is not influenced by the applied VBG (due to its negligible impact on the front-gate oxide field, Eox). Therefore, supplying an FBB during ON-state can be used to adjust device performance—as VBG modulates the channel current through Vth and mobility—without reliability penalty. On the other hand, if the back-gate bias is applied during both ON- and OFF-states, while a constant stress Vov is maintained by adjusting the front-gate VG [i.e., VG – Vth (VBG) is kept constant under different VBG’s], the BTI reliability can be improved under FBB (due to a reduced Eox in the front-gate) without performance loss. The latter property can be used to improve the device reliability under circuit operation. [ABSTRACT FROM AUTHOR]

The impact of out-of-plane mechanical stress on a hafnium zirconium oxide (HZO) based ferroelectric field effect transistor (FeFET) is studied using a nanoindenter combined with in-situ probing. It is demonstrated that the hysteresis loop shrinks with increasing compressive stress. The device current shows significant dependence on mechanical stress. By ab initio simulations, the Landau potentials of HZO under stress are calculated. The parameters of the Landau-Khalatnikov (LK) equation are extracted and used as input to a TCAD model. The simulation results match well to the experimental results. [ABSTRACT FROM AUTHOR]

We present an in-depth analysis of the reliability of plasma oxidized magnetic tunnel junctions, using constant voltage stress until breakdown. In the stress measurements, prebreakdown current jumps were also observed. We show that the prebreakdown jumps, as well as the final breakdown are caused by the generation of single trap conduction paths in the barrier. Finally, we demonstrate that applying stress can also cause gradual resistance changes, which can either be reversible or irreversible. Index Terms--Dielectric breakdown, magnetic tunnel junctions, reliability.