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Utilizing reactive DC magnetron sputtering method, TiN coatings were deposited on the silicon substrates at different nitrogen flows and powers. A study of the X-ray phase composition of the coatings was carried out. The stoichiometric composition of the coatings was determined using energy dispersive x-ray spectroscopy. The structure of the surface, cross-section, and thickness of the coatings were determined using scanning electron (SEM) and atomic force microscopy (AFM). A significant change in the surface structure of TiN coatings was established with changes in deposition power and nitrogen flow. SEM images of cross-sections of all coated samples showed that the formation of coatings occurs in the form of a columnar structure with a perpendicular orientation relative to the silicon substrate. The mechanical properties (elastic modulus E and microhardness H) of TiN coatings of the first group demonstrate a maximum at a nitrogen flow of 3 sccm and are 184 ± 11 GPa and 15.7 ± 1.3 GPa, respectively. In the second group, the values of E and H increase due to a decrease in the size of the structural elements of the coating (grains and crystallites). In the third group, E and H decrease. Microtribological tests were carried out in 4 stages: at a constant load, multi-cycle for 10 and 100 cycles, and with increasing load. The coefficient of friction (CoF) and specific volumetric wear ω depend on the roughness, topology, and mechanical properties of the resulting coatings. Fracture toughness was determined using nanoscratch and depends on the mechanical properties of TiN coatings. Within each group, coatings with the best mechanical and microtribological properties were described: in the first group—TiN coating at 3 sccm (with (29.6 ± 0.1) at.% N), in the second group—TiN coating at 2 sccm (with (40.8 ± 0.2) at.% N), and in the third group—TiN coating at 1 sccm (c (37.3 ± 0.2) at.% N). [ABSTRACT FROM AUTHOR]

Tools and machine surfaces are subjected to various types of damage caused by many different factors. Due to this, the protecting coatings characterized by the best properties for a given treatment or environment are used. AlCrN coatings with different compositions, synthesized by different methods, are often of interest to scientists. The aim of the presented work was the deposition and investigation of two sets of coatings: (1) formed in nitrogen pressure from 0.8 Pa to 5 Pa and (2) formed at arc current from 50 A to 100 A. We study relationships between the above technological parameters and discuss their properties. Coatings formed at nitrogen pressure (pN2) up to 3 Pa crystallize both in hexagonal AlN structure and the cubic CrN structure. For pN2 > 3 Pa, they crystallize in the CrN cubic structure. Crystallite size increases with nitrogen pressure. The coatings formed at different arc currents have a cubic CrN structure and the crystallite size is independent of the current. The adhesion of the coatings is very good, independent of nitrogen pressure and arc current. [ABSTRACT FROM AUTHOR]

Alteration of the phase composition of a coating and/or its surface topography can be achieved by changing the deposition technology and/or introducing additional elements into the coating. Investigation of the effect of the composition of CrN-based coatings (including AlCrN and CrON) on the microparticle height and volume, as well as the construction of correlations between the friction coefficient at the microscale and the geometry of microparticles, are the goals of this study. We use atomic force microscopy (AFM), which is the most effective method of investigation with nanometer resolution. By revealing the morphology, AFM allows one to determine the diameter of the particles, their heights and volumes and to identify different phases in the studied area by contrasted properties. The evaluation of the distribution of mechanical properties (modulus of elasticity E and microhardness H) on the surfaces of multiphase coatings with microparticles is carried out by using the nanoindentation method. It is found that the roughness decreases with an increase in the Al concentration in AlCrN. For the CrON coatings, the opposite effect is observed. Similar conclusions are valid for the size of the microparticles and their height for both types of coating. [ABSTRACT FROM AUTHOR]

• ZrN coatings were grown on the polished steel substrates at the different N flow rate. • Nanocrystalline microstructure of the surface are explored by AFM analysis. • The main texture of ZrN phase changes from (111) to (200) with the increase of N. • E and H were analyzed by nanoindentation. ZrN coatings with the thickness of about 3 μm were deposited on hardened steel substrates by reactive magnetron sputtering at the constant magnetron power of 700 W and at the substrate bias voltage about − 10 V with different nitrogen flow rate from 3 to 6 sccm. The surface investigations were carried out using scanning electron microscopy, atomic-force microscopy, nanoindentation and glancing-angle X-ray diffraction. It was found that the texture of ZrN phase, the mechanical properties and the size of grains in the polycrystalline ZrN coatings can be controlled using different nitrogen flows. [ABSTRACT FROM AUTHOR]

Utilizing reactive DC magnetron sputtering method, TiN coatings were deposited on the silicon substrates at different nitrogen flows and powers. A study of the X-ray phase composition of the coatings was carried out. The stoichiometric composition of the coatings was determined using energy dispersive x-ray spectroscopy. The structure of the surface, cross-section, and thickness of the coatings were determined using scanning electron (SEM) and atomic force microscopy (AFM). A significant change in the surface structure of TiN coatings was established with changes in deposition power and nitrogen flow. SEM images of cross-sections of all coated samples showed that the formation of coatings occurs in the form of a columnar structure with a perpendicular orientation relative to the silicon substrate. The mechanical properties (elastic modulus E and microhardness H ) of TiN coatings of the first group demonstrate a maximum at a nitrogen flow of 3 sccm and are 184 ± 11 GPa and 15.7 ± 1.3 GPa, respectively. In the second group, the values of E and H increase due to a decrease in the size of the structural elements of the coating (grains and crystallites). In the third group, E and H decrease. Microtribological tests were carried out in 4 stages: at a constant load, multi-cycle for 10 and 100 cycles, and with increasing load. The coefficient of friction (CoF) and specific volumetric wear ω depend on the roughness, topology, and mechanical properties of the resulting coatings. Fracture toughness was determined using nanoscratch and depends on the mechanical properties of TiN coatings. Within each group, coatings with the best mechanical and microtribological properties were described: in the first group-TiN coating at 3 sccm (with (29.6 ± 0.1) at.% N), in the second group-TiN coating at 2 sccm (with (40.8 ± 0.2) at.% N), and in the third group-TiN coating at 1 sccm (c (37.3 ± 0.2) at.% N).