Pierre Baudoz, Serge Habraken, Markku Kuittinen, Michael Karlsson, Olivier Absil, Valentin Christiaens, Dimitri Mawet, Anthony Boccaletti, Jean Surdej, Pontus Forsberg, Ismo Vartiainen, Christian Delacroix, Sibley School of Mechanical and Aerospace Engineering (MAE), Cornell University [New York], Department of Engineering Sciences, Institut d'astrophysique spatiale (IAS), Université Paris-Sud - Paris 11 (UP11)-Institut national des sciences de l'Univers (INSU - CNRS)-Centre National de la Recherche Scientifique (CNRS), Departamento de Astronomía, Universidad de Chile = University of Chile [Santiago] (UCHILE), Laboratoire d'études spatiales et d'instrumentation en astrophysique (LESIA), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut national des sciences de l'Univers (INSU - CNRS)-Observatoire de Paris, Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Université Paris Diderot - Paris 7 (UPD7)-Centre National de la Recherche Scientifique (CNRS), Observatoire de Paris, Université Paris sciences et lettres (PSL), University of Eastern Finland, Joseph Louis LAGRANGE (LAGRANGE), Université Nice Sophia Antipolis (... - 2019) (UNS), COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Institut national des sciences de l'Univers (INSU - CNRS)-Observatoire de la Côte d'Azur, Université Côte d'Azur (UCA)-COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Université Côte d'Azur (UCA)-Centre National de la Recherche Scientifique (CNRS), Université de Liège, Université Paris-Sud - Paris 11 (UP11)-Institut national des sciences de l'Univers (INSU - CNRS)-Centre National de la Recherche Scientifique (CNRS)-Centre National d’Études Spatiales [Paris] (CNES), Université Nice Sophia Antipolis (1965 - 2019) (UNS), and COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Université Côte d'Azur (UCA)-Université Côte d'Azur (UCA)-Centre National de la Recherche Scientifique (CNRS)
Coronagraphy is a powerful technique to achieve high contrast imaging and hence to image faint companions around bright targets. Various concepts have been used in the visible and near-infrared regimes, while coronagraphic applications in the mid-infrared remain nowadays largely unexplored. Vector vortex phase masks based on concentric subwavelength gratings show great promise for such applications. We aim at producing and validating the first high-performance broadband focal plane phase mask coronagraphs for applications in the mid-infrared regime, and in particular the L band with a fractional bandwidth of ~16% (3.5-4.1 \mu m). Based on rigorous coupled wave analysis, we designed an annular groove phase mask (AGPM) producing a vortex effect in the L band, and etched it onto a series of diamond substrates. The grating parameters were measured by means of scanning electron microscopy. The resulting components were then tested on a mid-infrared coronagraphic test bench. A broadband raw null depth of 2 x 10^{-3} was obtained for our best L-band AGPM after only a few iterations between design and manufacturing. This corresponds to a raw contrast of about 6 x 10^{-5} (10.5 mag) at 2\lambda/D. This result is fully in line with our projections based on rigorous coupled wave analysis modeling, using the measured grating parameters. The sensitivity to tilt and focus has also been evaluated. After years of technological developments, mid-infrared vector vortex coronagraphs finally become a reality and live up to our expectations. Based on their measured performance, our L-band AGPMs are now ready to open a new parameter space in exoplanet imaging at major ground-based observatories., Comment: 8 pages, 11 figures