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1. Production of vapors of solid compounds by sublimation in a fluidized bed

Author

Sarantopoulos, Christos, Toro, David, Senocq, François, Vahlas, Constantin, Caussat, Brigitte, Moersch, Tyler, Gladfelter, Wayne L., Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE), Université Toulouse III - Paul Sabatier - UT3 (FRANCE), University of Minnesota (USA), and Centre National de la Recherche Scientifique - CNRS (FRANCE)

Subjects
Fluidized bed, Precursor sublimation, Matériaux, Génie chimique, CVD
Published
2005

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