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The Sensorex and Q-Flex type inclinometer calibration facility in JAXA Wintec was developed in August, 2003. The Inclinometer Calibration Facility is introduced and 2-axis servo inclinometer calibration formula based on servo inclinometer model is derived in this paper. With an example for a wind tunnel testing using the Sensorex41400 servo inclinometer conducted in JAXA 6.5- by 5.5- m Low Speed Wind Tunnel, we show the application of the inclinometer to the wind tunnel testing., 資料番号: AA0063607003, レポート番号: JAXA-SP-07-005

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20070517-20070518, 資料番号: AA0063607000, レポート番号: JAXA-SP-07-005

We develop vibration measuring equipment using high accurate inclimeter sensor that was not used in the past studies related to MEMS sensor. Since high accurate inclimeter sensor has higher resolution and lower self-noises than general MEMS sensors, it is able to measure slighter vibration than the MEMS sensors. In order to examine performance of the equipment developed in this study, vibration characteristics of wooden house is investigated by measurement by using the equipment and servo type accelerometer. Natural frequencies of Fourier spectra of acceleration waves measured by this equipment are mostly corresponded to that measured by the servo type accelerometer. Moreover, natural frequencies of transfer function evaluated by servo type accelerometer are close to those of Fourier spectra., 本研究では，これまでのMEMSセンサに関する研究で用いられていない高精度傾斜センサによる振動測定装置を試作した．高精度傾斜センサは一般的なMEMSセンサと比べて分解能が高く，自己ノイズも小さいため，従来よりも小さな振動を測定することができる． 試作した振動測定装置の性能を調べるためにサーボ型加速度計とともに，木造建物の常時微動を測定し，加速度フーリエスペクトルから建物の振動特性を評価した．これらの装置の計測波形から求めたフーリエスペクトルの固有振動数は概ね一致した．また，サーボ型加速度計で評価した伝達関数の固有振動数はフーリエスペクトルの固有振動数と近い値となった．