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Micro machining of single-crystalline silicon is performed with the second-harmonic of Nd:YAG laser in this study. In experiments, various shapes of plastic microlens are fabricated on a transparent substrate by the developed die-less method. These microlenses are shaped by thermal deformation induced by the Er:YAG laser beam absorbable for the acrylate resin. And then, these lenses are used as optical devices to generate the local high energy density desired for machining of silicon in air and water. Machining characteristics are investigated in the single groove machining process, and the grid groove pattern and the herringbone pattern are formed to demonstrate the feasibility of proposed methods.

Microlens is a key component in the fields of optical communication, data storage and digital display. Integration of microlenses and optical devices is also required for weight saving, reduction in assembly cost and higher accurate alignment. This paper deals with the development of a novel method to fabricate spherical microlenses and microlens arrays. In this method, microlenses are formed on the surface of acrylate resin which is used as sealing material for the optical devices such as photodetectors, laser diodes, CCD image sensors and so on. Microlenses are fabricated under several conditions, and the influences of process parameters on the dimension of microlenses are investigated. The fabricated microlens and microlens array have the appropriate shape, surface finish and alignment so as to condense light.

金沢大学理工研究域機械工学系, レーザ誘起熱変形によってプラスチック球状レンズおよびレンズアレイを作製する方法については前報において報告した。本研究ではEr:YAGレーザビームを照射しながらプラスチック試料を移動させることで直線状およびリング状のシリンドリカルレンズを作製し、レンズ形状と加工条件の関係について検討している。, 出版者照会後に全文公開