Submitted by Diego Henrique de Oliveira Machado (diego.machado@unesp.br) on 2020-06-16T15:03:34Z No. of bitstreams: 1 Tese Diego - final.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Submitted by Diego Henrique de Oliveira Machado (diego.machado@unesp.br) on 2020-06-16T15:03:34Z No. of bitstreams: 1 Tese Diego - final.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Submitted by Diego Henrique de Oliveira Machado (diego.machado@unesp.br) on 2020-06-16T15:03:34Z No. of bitstreams: 1 Tese Diego - final.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Approved for entry into archive by Celia Silva Cruz Morales (celia.morales@unesp.br) on 2020-06-16T18:03:12Z (GMT) No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Submitted by Diego Henrique de Oliveira Machado (diego.machado@unesp.br) on 2020-06-16T15:03:34Z No. of bitstreams: 1 Tese Diego - final.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Approved for entry into archive by Celia Silva Cruz Morales (celia.morales@unesp.br) on 2020-06-16T18:03:12Z (GMT) No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Made available in DSpace on 2020-06-16T18:03:12Z (GMT). No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Previous issue date: 2020-04-30 Made available in DSpace on 2020-06-16T18:03:12Z (GMT). No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Previous issue date: 2020-04-30 Approved for entry into archive by Celia Silva Cruz Morales (celia.morales@unesp.br) on 2020-06-16T18:03:12Z (GMT) No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Approved for entry into archive by Celia Silva Cruz Morales (celia.morales@unesp.br) on 2020-06-16T18:03:12Z (GMT) No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Submitted by Diego Henrique de Oliveira Machado (diego.machado@unesp.br) on 2020-06-16T15:03:34Z No. of bitstreams: 1 Tese Diego - final.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Approved for entry into archive by Celia Silva Cruz Morales (celia.morales@unesp.br) on 2020-06-16T18:03:12Z (GMT) No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Approved for entry into archive by Celia Silva Cruz Morales (celia.morales@unesp.br) on 2020-06-16T18:03:12Z (GMT) No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Made available in DSpace on 2020-06-16T18:03:12Z (GMT). No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Previous issue date: 2020-04-30 Approved for entry into archive by Celia Silva Cruz Morales (celia.morales@unesp.br) on 2020-06-16T18:03:12Z (GMT) No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Submitted by Diego Henrique de Oliveira Machado (diego.machado@unesp.br) on 2020-06-16T15:03:34Z No. of bitstreams: 1 Tese Diego - final.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Made available in DSpace on 2020-06-16T18:03:12Z (GMT). No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Previous issue date: 2020-04-30 Made available in DSpace on 2020-06-16T18:03:12Z (GMT). No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Previous issue date: 2020-04-30 Submitted by Diego Henrique de Oliveira Machado (diego.machado@unesp.br) on 2020-06-16T15:03:34Z No. of bitstreams: 1 Tese Diego - final.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Made available in DSpace on 2020-06-16T18:03:12Z (GMT). No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Previous issue date: 2020-04-30 Approved for entry into archive by Celia Silva Cruz Morales (celia.morales@unesp.br) on 2020-06-16T18:03:12Z (GMT) No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Approved for entry into archive by Celia Silva Cruz Morales (celia.morales@unesp.br) on 2020-06-16T18:03:12Z (GMT) No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Approved for entry into archive by Celia Silva Cruz Morales (celia.morales@unesp.br) on 2020-06-16T18:03:12Z (GMT) No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Approved for entry into archive by Celia Silva Cruz Morales (celia.morales@unesp.br) on 2020-06-16T18:03:12Z (GMT) No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Made available in DSpace on 2020-06-16T18:03:12Z (GMT). No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Previous issue date: 2020-04-30 Made available in DSpace on 2020-06-16T18:03:12Z (GMT). No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Previous issue date: 2020-04-30 Made available in DSpace on 2020-06-16T18:03:12Z (GMT). No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Previous issue date: 2020-04-30 Approved for entry into archive by Celia Silva Cruz Morales (celia.morales@unesp.br) on 2020-06-16T18:03:12Z (GMT) No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Made available in DSpace on 2020-06-16T18:03:12Z (GMT). No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Previous issue date: 2020-04-30 Approved for entry into archive by Celia Silva Cruz Morales (celia.morales@unesp.br) on 2020-06-16T18:03:12Z (GMT) No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Made available in DSpace on 2020-06-16T18:03:12Z (GMT). No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Previous issue date: 2020-04-30 Submitted by Diego Henrique de Oliveira Machado (diego.machado@unesp.br) on 2020-06-16T15:03:34Z No. of bitstreams: 1 Tese Diego - final.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Made available in DSpace on 2020-06-16T18:03:12Z (GMT). No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Previous issue date: 2020-04-30 Made available in DSpace on 2020-06-16T18:03:12Z (GMT). No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Previous issue date: 2020-04-30 Made available in DSpace on 2020-06-16T18:03:12Z (GMT). No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Previous issue date: 2020-04-30 Approved for entry into archive by Celia Silva Cruz Morales (celia.morales@unesp.br) on 2020-06-16T18:03:12Z (GMT) No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Approved for entry into archive by Celia Silva Cruz Morales (celia.morales@unesp.br) on 2020-06-16T18:03:12Z (GMT) No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Made available in DSpace on 2020-06-16T18:03:12Z (GMT). No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Previous issue date: 2020-04-30 Made available in DSpace on 2020-06-16T18:03:12Z (GMT). No. of bitstreams: 1 machado_dho_dr_bauru.pdf: 6606698 bytes, checksum: 381cfce35b622e58e9338fc5ced918a3 (MD5) Previous issue date: 2020-04-30 Fundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP) Este trabalho visa apresentar o desenvolvimento e as principais conclusões referentes à combinação de heterojunções a base de GaAs com óxidos semicondutores, para aplicações em dispositivos optoeletrônicos. O texto foi dividido em duas partes principais, sendo a primeira parte voltada para a síntese e produção do SnO2, relacionada com a formação da heteroestrutura GaAs/SnO2; e a segunda parte é focada na produção dos ressonadores de onda acústicas de bulk,na ordem de GHz, a base de GaAs/ZnO. Na primeira parte, priorizou-se filmes de SnO2, que foram depositados por duas técnicas: sol-gel dip-coating e evaporação resistiva. Os filmes foram depositados sobre substratos de vidro soda-lime, e sobre substratos de GaAs, de quartzo e de a-SiO2. SnO2 foi também depositado sobre filme de GaAs depositado por sputtering. No caso da evaporação resistiva, a rota sol-gel é utilizada também para a preparação do pó que é utilizado como precursor para a evaporação resistiva de filmes de SnO2, combinando essas duas técnicas. Foram investigadas as propriedades ópticas e elétricas de filmes finos de SnO2 dopado com 1% de Er3+ e estruturas hibridas de GaAs/SnO2: Er3+. Entre os principais resultados, verificou-se: 1) espectros de luminescência diferentes do íon Er3+ ao se depositar SnO2 sobre substrato de vidro ou GaAs; 2) Microscopia eletrônica de varredura (MEV) e espectroscopia de energia dispersiva de raios-x (EDX) para filmes de SnO2, depositados por evaporação resistiva, atestaram uma relação da temperatura de tratamento térmico com a concentração de íons de Er nas camadas superficiais; 3) a concentração de íons de Er3+ na superfície de filmes evaporados de SnO2 possui um papel importante para a observação da fotoluminescência destes íons e para adsorção de gás na superfície; 4) MEV e microscopia óptica para filmes de SnO2 depositados por evaporação resistiva mostram que esses filmes apresentam boa aderência sobre filmes de GaAs, estando relacionado com a combinação das técnicas sol-gel e evaporação resistiva. Na segunda parte do trabalho, onde se utilizou combinação de filmes de GaAs depositado por epitaxia de feixe molecular (MBE) com óxido de ZnO, depositado por sputtering, investigou-se a geração e propagação de ondas acústicas de bulk (BAW) de alta frequência em substratos de GaAs usando filmes finos piezoelétricos de ZnO e AlN produzidos por RF sputtering. Foi verificada a eficiência de conversão eletroacústica de ressonadores de BAW baseados nesses materiais piezoelétricos. Foi investigada a propagação das ondas acústicas longitudinais na faixa 1 a 20 GHz no intervalo 10 a 300 K, por meio de medidas de reflexões de radiofrequência, permitindo a determinação do coeficiente de absorção acústica intrínseca em GaAs (α) em frequências da ordem de GHz. This work aims to present the development and the main conclusions obtained so far regarding the combination of GaAs-based heterojunctions with semiconductor oxides, for applications in optoelectronic devices. The text has been divided in two main parts, where the first one is related to the synthesis and production of SnO2, associated with the formation of the heterostructure GaAs/SnO2; and the second one if focused on the production of bulk acoustic wave resonators, with frequencies in GHz range, based on GaAs/ZnO. In the first part, attention was given to SnO2 films, deposited by two techniques: sol-gel dipcoating and resistive evaporation, on soda-lime glass substrates, and on GaAs, quartz and a-SiO2 substrates. SnO2 was also deposited on GaAs film deposited by sputtering. In the case of resistive evaporation, the sol-gel route is also used to prepare the powder which is used as a precursor for resistive evaporation of SnO2 films, then, by combining these two techniques. Optical and electrical properties of Er3+ -doped SnO2 thin films were investigated as well as the hybrid structure GaAs/SnO2 .Among the main results were: 1) different luminescence spectra of Er3+ ion when depositing SnO2 on glass or GaAs substrate; 2) scanning electron microscopy (SEM) and energy dispersive x-ray spectroscopy (EDX) for SnO2 films deposited by resistive evaporation show a relationship of the thermal annealing temperature with the concentration of Er ions in the surface layers; 3) this concentration of Er3+ ions on the surface of evaporated SnO2 films affects the photoluminescence spectra and the gas adsorption on the surface; 4) SEM and optical microscopy for resistive evaporation deposited SnO2 films show that these films have good adhesion on GaAs layers, being related to the combination of sol-gel and resistive evaporation techniques. In the second part of the work, where a combination of MBE deposited GaAs with ZnO oxide was used, the generation and propagation of high frequency bulk acoustic waves (BAW) in GaAs substrates was investigated, using ZnO and AlN piezoelectric thin films produced by RF-sputtering. It was verified the electroacoustic conversion efficiency of BAW resonators based on these piezoelectric materials. The propagation of longitudinal acoustic waves in the range 1 to 20 GHz (10 to 300 K) was investigated by means of radiofrequency reflection measurements, allowing the determination of the intrinsic acoustic absorption coefficient in GaAs (α) at frequencies of the order of GHz. FAPESP: 2016/12216-6 FAPESP 2017/24311-6 CAPES