1. 'Actuation at a distance' of microelectromechanical systems using photoelectrowetting: proof-of-concept
- Author
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Gaudet, Matthieu and Arscott, Steve
- Subjects
Condensed Matter - Materials Science ,Physics - Instrumentation and Detectors ,Fluid Dynamics (physics.flu-dyn) ,Materials Science (cond-mat.mtrl-sci) ,FOS: Physical sciences ,Physics - Fluid Dynamics ,Instrumentation and Detectors (physics.ins-det) - Abstract
We demonstrate here a proof-of-concept experiment that microelectromechanical systems (MEMS) can be actuated using photoelectrowetting. In order to demonstrate this, a 30 \mu m thick aluminum cantilever is actuated using an ordinary white light source. A deflection of 56 \mu m is observed using a light irradiance equal to \approx 1000 W m-2 at a bias of 7 V. The deflection of the cantilever relies on the recently observed photoelectrowetting effect [Sci. Rep.1, 184 (2011)]. Such "actuation at a distance" could be useful for optical addressing and control of autonomous wireless sensors, MEMS and microsystems.
- Published
- 2012
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