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1. Uncertainty analysis of MEMS force gauges based on Monte Carlo method

Author

韩 琪 Han Qi, 陈贵敏 Chen Gui-min, and 邵晓东 Shao Xiao-dong

Subjects
Microelectromechanical systems, Computer science, Monte Carlo method, Mechanical engineering, Atomic and Molecular Physics, and Optics, Uncertainty analysis, Electronic, Optical and Magnetic Materials
Published
2018

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