1. Lattice parameters of ScxAl1−xN layers grown on GaN(0001) by plasma-assisted molecular beam epitaxy
- Author
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Duc V. Dinh, Jonas Lähnemann, Lutz Geelhaar, and Oliver Brandt
- Subjects
Physics and Astronomy (miscellaneous) - Abstract
An accurate knowledge of lattice parameters of Sc xAl1− xN is essential for understanding the elastic and piezoelectric properties of this compound as well as for the ability to engineer its strain state in heterostructures. Using high-resolution x-ray diffractometry, we determine the lattice parameters of 100-nm-thick undoped Sc xAl1− xN layers grown on GaN(0001) templates by plasma-assisted molecular beam epitaxy. The Sc content x of the layers is measured independently by both x-ray photoelectron spectroscopy and energy-dispersive x-ray spectroscopy, and it ranges from 0 to 0.25. The in-plane lattice parameter of the layers linearly increases with increasing x, while their out-of-plane lattice parameter remains constant. Layers with [Formula: see text] are found to be lattice matched to GaN, resulting in a smooth surface and a structural perfection equivalent to that of the GaN underlayer. In addition, a two-dimensional electron gas is induced at the Sc xAl1− xN/GaN heterointerface, with the highest sheet electron density and mobility observed for lattice-matched conditions.
- Published
- 2023
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