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The surface of 180- $\mu \text{m}$ polyethylene (PE) and 200-nm polytetrafluoroethylene (PTFE) powders are hydrophilized by using surface dielectric barrier discharge (sDBD) applied to a batch of 20 g for both cases. On the sDBD electrode, charged particles by plasma generation are able to diffuse onto the power surface through small voids. In order to know the level of hydrophilic treatment on the powder, absorption tests by using droplet was carried out. This principle is based on the fact that the inner gap between powders are small enough that a liquid with a certain surface tension is absorbed or formed on powder layer when dropped on the powder surface. The minimum isopropyl alcohol (IPA) concentration absorbed into the powder was measured by an aqueous solution with a mixture of IPA and D.I water. By lowering the IPA concentration, improvements in the hydrophilicity were obtained. The concentration of IPA before treatment of PE powder was 15% and decreased to 3% after treatment. In the case of PTFE, IPA concentration decreased slightly from 39% to 30% after the treatment. Also, the surface treated PE and PTFE displays a significant difference in the degree of dispersion in water and n-methyl pyrollidone solvent. In the field-emission scanning electron microscope analysis, the morphology of the treated surface was clean. From composition of the surface by X-ray photoelectron spectroscopy, when the untreated sample is 100% C–H, the plasma treated PE shows 82.48% C–H, and 17.52% C–O. A partial change in the C–F bond is shown for PTFE.

ISO-Space refers to the ISO-Space (2014b) annotation standard for spatial information in language. Soon after its publication, Lee (2016) and Pustejovsky and Lee (2017) noted its failure to conform to the principles of semantic annotation laid down in the principles of semantic annotation (ISO 2016) and also its inadequacy to capture the dynamic aspect of spatial information involving trajectories created by motions. This paper thus proposes to revise ISO-Space to focus on the dynamic aspect of spatial information, while making the revised version, tentatively named ”I-Space”, conform to the ISO (2016) principles of semantic annotation. For this revision, four modifications are introduced. First, event-paths are formally defined as sequences of spatio- temporal locations associated with motional trajectories. Second, these trajectories are treated as genuine spatial entities of the event-path type in their annotation structures. Third, the link, tagged , in ISO-Space is re-formulated as a relation between a moving object and an event-path traversed by that object. Fourth, the spatial measure link, tagged , in ISO-Space is generalized to cover spatiotemporal measures involving both space and time, and motions.

The main purpose of this paper is to make some linguistic contributions to an ISO initiative to formulate a standard on the semantic annotation framework of reference, coreference, and other types of anaphoric phenomena in natural language. For this purpose, we first make a brief review of some of the existing coreference annotation (CA) schemes. We then formulate an abstract syntax Asynana for anaphoric annotation on which a variety of concrete syntaxes such as an XML-based concrete syntax CsynanaX can be developed to provide an interoperable representation format for the annotation. To satisfy the semantic adequacy of the proposed abstract syntax even partially, we check the possibility of developing formal semantics based on it. Such a semantics may be accepted as a valid application of the proposed annotation scheme. We finally consider the multilingual applicability of proposed ASynana by applying it to Korean, a non-inflectional agglutinating language with pro-drop properties.

In situ spectroscopic ellipsometry, deep UV ellipsometry, and imaging ellipsometry were employed to study the absorption of liquid by photoresist(PR) used for 193 nm immersion lithography. When 140 nm thick PR was soaked in water over a period of >70 minutes, ~7% increase in thickness was observed. From the analysis of ellipsometric spectra covering from near infrared to deep UV, we could estimates less than 2 vol. % uptake of water by PR after completion of soaking. This resulted in very small decrease in refractive index of PR (~0.4%). When imaging ellipsometry was used, the absorption of water by PR in much shorter periods could be detectible. In imaging ellipsometry, the microscopic images of (Δ,Ψ ) in small area are obtained thanks to two dimensional multi-channel detection systems such as CCD. Using imaging ellipsometry, we could observe the interaction of PR with water even upon 1 s of contact. Also, we found that the water absorption or interaction was not uniform over surface. More studies are required for the implication of this observation. Obviously, imaging ellipsometry is a good technique to inspect water mark in immersion lithography. We also repeated similar experiments for high reflective index liquid (JSR HIL-001) but to find negligible change by imaging ellipsometry.