1. Simple coplanar waveguide resonator mask targeting metal-substrate interface
- Author
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Kopas, Cameron J., Lachman, Ella, McRae, Corey Rae H., Mohan, Yuvraj, Mutus, Josh Y., Nersisyan, Ani, and Poudel, Amrit
- Subjects
Quantum Physics ,FOS: Physical sciences ,Physics - Applied Physics ,Applied Physics (physics.app-ph) ,Quantum Physics (quant-ph) - Abstract
This white paper presents a single-layer mask, found at https://github.com/Boulder-Cryogenic-Quantum-Testbed/simple-resonator-mask. It is designed for fabrication of superconducting microwave resonators towards 1:1 comparisons of dielectric losses from the metal-substrate interface. Finite-element electromagnetic simulations are used to determine participation ratios of the four major regions of the on-chip devices, as well as to confirm lack of crosstalk between neighboring devices and demonstrate coupling tunability over three orders of magnitude. This mask is intended as an open-source community resource for facilitating precise and accurate comparisons of materials in the single-photon, millikelvin regime.
- Published
- 2022
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