1. Planar-type silicon thermoelectric generator with phononic nanostructures for 100 μW energy harvesting
- Author
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Yanagisawa, Ryoto, Koike, Sota, Nawae, Tomoki, Tsujii, Naohito, Wang, Yanan, Mori, Takao, Ruther, Patrick, Paul, Oliver, Yoshida, Yoshifumi, Harashima, Junichi, Kinumura, Takashi, Inada, Yuta, and Nomura, Masahiro
- Subjects
FOS: Physical sciences ,Applied Physics (physics.app-ph) - Abstract
Energy harvesting is essential for the internet-of-things networks where a tremendous number of sensors require power. Thermoelectric generators (TEGs), especially those based on silicon (Si), are a promising source of clean and sustainable energy for these sensors. However, the reported performance of planar-type Si TEGs never exceeded power factors of 0.1 $μ Wcm^{-2} K^{-2}$ due to the poor thermoelectric performance of Si and the suboptimal design of the devices. Here, we report a planar-type Si TEG with a power factor of 1.3 $μ Wcm^{-2} K^{-2}$ around room temperature. The increase in thermoelectric performance of Si by nanostructuring based on the phonon-glass electron-crystal concept and optimized three-dimensional heat-guiding structures resulted in a significant power factor. In-field testing demonstrated that our Si TEG functions as a 100-$μW$-class harvester. This result is an essential step toward energy harvesting with a low-environmental load and cost-effective material with high throughput, a necessary condition for energy-autonomous sensor nodes for the trillion sensors universe.
- Published
- 2023
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