1. Co-effect of dielectric layer material and driving pulse polarity on the spatial emission intensity distributions of micro dielectric barrier discharge
- Author
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Xiaoqin Ma, Wang Yaogong, Wenjiang Wang, Lichi Chen, Zhou Chenjie, and Xiaoning Zhang
- Subjects
Permittivity ,Materials science ,Acoustics and Ultrasonics ,Microplasma ,Relative permittivity ,Dielectric barrier discharge ,Dielectric ,Condensed Matter Physics ,Secondary electrons ,Cathode ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,law.invention ,law ,Electric field ,Atomic physics - Abstract
A micro concentric ring device with asymmetric dielectrics (glass and n-silicon) is driven by a bipolar pulse generator with 20 kHz frequency, 1 μs pulse width, 50 ns rising/falling time, 3.6 kV peak-to-peak voltage, and the spatial emission intensity distributions in the device are investigated. The experiments are operated at 133 mbar pure argon. The spatial-temporal microplasma evolution recorded by ICCD illustrates that the 'edge emission' is arisen in the microchannels, when the electrode (ITO) on which the glass dielectric is located acts as the cathode. However, when the electrode (conductive silver paste) adjacent to the n-silicon acts as the cathode, the 'center emission' will be induced. The dielectric metarials properties (relative permittivity and secondary electron emission coefficient), synergistically with the pulse polarity which determines the influence of the residual long-living particles generated by previous discharge on the subsequent discharge, are inferred to be responsible for the distinct spatial emission intensity distributions at different pulse polarities. When the n-silicon is situated on the cathode, the high permittivity of n-silicon repels the electric field into plasma which means that the electrons can obtain more energy in their first half journey, and what's more the high secondary electron yield of n-silicon makes it possibile to provide more seed electrons for microdischarge. This mechanism of electrons dynamics leads to the occurrence of 'center emission'. When the positive half period of bipolar pulse arrives at n-silicon, the residual charged particles generated by previous discharge will induce a reversed electric field in channel center to impair the applied electric field and brings about the 'edge emission', but this can not be emerged in the microdischarge powered by unipolar pulse. The investigation of spatial emission intensity distribtuions of microplasmas is an important task for the comprehension of devices based on microstructure techniques.
- Published
- 2021