1. Using Temporally Synthesized Laser Pulses to Enhance the Conversion Efficiency of Sn Plasmas for EUV Lithography
- Author
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Hanchen Wang, Zhonghao Lyu, Vyacheslav N. Shlyaptsev, Brendan A. Reagan, Eric M. Gullikson, Liang Yin, Jorge J. Rocca, Regina Soufli, and Cory Baumgarten
- Subjects
lcsh:Applied optics. Photonics ,Chirped pulse amplification ,Materials science ,Extreme ultraviolet lithography ,Optical Physics ,02 engineering and technology ,laser-produced plasma ,01 natural sciences ,Semiconductor laser theory ,law.invention ,010309 optics ,Optics ,Affordable and Clean Energy ,pulse sequence ,law ,0103 physical sciences ,lcsh:QC350-467 ,Electrical and Electronic Engineering ,Communications Technologies ,business.industry ,Energy conversion efficiency ,lcsh:TA1501-1820 ,Nanosecond ,021001 nanoscience & nanotechnology ,Laser ,Atomic and Molecular Physics, and Optics ,Pulse (physics) ,Extreme ultraviolet ,EUV emission ,Spectroscopic characterization ,0210 nano-technology ,business ,pulse shaping ,lcsh:Optics. Light ,conversion efficiency - Abstract
We have studied the laser pulse shape dependence of the conversion efficiency of λ = 1.03 μm laser pulse energy into 13.5 nm extreme ultraviolet (EUV) emission from a Sn laser-produced plasma. Laser pulses of arbitrary temporal shape ranging from hundreds of picoseconds to several nanoseconds were generated using a programmable pulse synthesizer based on a diode-pumped chirped pulse amplification Yb: YAG laser. Measurements show that the conversion efficiency favors the use of nearly square pulses of duration longer than 2 ns, in agreement with hydrodynamic/atomic physics simulations. A 35% increase in conversion efficiency was obtained when Q-switched pulses were substituted by square pulses of a similar duration. Experiments conducted irradiating a Sn target with a sequence of two time-delayed 250 ps pulses showed a 30 percent increase in the EUV yield respect to a single pulse of the same total energy when the pulse separation was optimum at 2.1 ns. This suggests that re-heating of the plasma with delayed laser pulses could be used to improve the EUV yield. The spectroscopic characterization of EUV emission and in-band EUV images that characterize the source size are also presented.
- Published
- 2021
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