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Herein, we investigate the temperature compensation for a dual-mass MEMS gyroscope. After introducing and simulating the dual-mass MEMS gyroscope's working modes, we propose a hybrid algorithm for temperature compensation relying on improved complete ensemble empirical mode decomposition with adaptive noise (ICEEMDAN), sample entropy, time–frequency peak filtering, non-dominated sorting genetic algorithm-II (NSGA II) and extreme learning machine. Firstly, we use ICEEMDAN to decompose the gyroscope's output signal, and then we use sample entropy to classify the decomposed signals. For noise segments and mixed segments with different levels of noise, we use time–frequency peak filtering with different window lengths to achieve a trade-off between noise removal and signal retention. For the feature segment with temperature drift, we build a compensation model using extreme learning machine. To improve the compensation accuracy, NSGA II is used to optimize extreme learning machine, with the prediction error and the 2-norm of the output-layer connection weight as the optimization objectives. Enormous simulation experiments prove the excellent performance of our proposed scheme, which can achieve trade-offs in signal decomposition, classification, denoising and compensation. The improvement in the compensated gyroscope's output signal is analyzed based on Allen variance; its angle random walk is decreased from 0.531076°/h/√Hz to 6.65894 × 10−3°/h/√Hz and its bias stability is decreased from 32.7364°/h to 0.259247°/h. [ABSTRACT FROM AUTHOR]

MEMS accelerometers are significantly impacted by temperature and noise, leading to a considerable compromise in their accuracy. In response to this challenge, we propose a parallel denoising and temperature compensation fusion algorithm for MEMS accelerometers based on RLMD-SE-TFPF and GRU-attention. Firstly, we utilize robust local mean decomposition (RLMD) to decompose the output signal of the accelerometer into a series of product function (PF) signals and a residual signal. Secondly, we employ sample entropy (SE) to classify the decomposed signals, categorizing them into noise segments, mixed segments, and temperature drift segments. Next, we utilize the time-frequency peak filtering (TFPF) algorithm with varying window lengths to separately denoise the noise and mixed signal segments, enabling subsequent signal reconstruction and training. Considering the strong inertia of the temperature signal, we innovatively introduce the accelerometer's output time series as the model input when training the temperature compensation model. We incorporate gated recurrent unit (GRU) and attention modules, proposing a novel GRU-MLP-attention model (GMAN) architecture. Simulation experiments demonstrate the effectiveness of our proposed fusion algorithm. After processing the accelerometer output signal through the RLMD-SE-TFPF denoising algorithm and the GMAN temperature drift compensation model, the acceleration random walk is reduced by 96.11 % , with values of 0.23032 g/h / Hz for the original accelerometer output signal and 0.00895695 g/h / Hz for the processed signal. [ABSTRACT FROM AUTHOR]

This article suggested two methods to compensate for the temperature drift of the micro-electro-mechanical system gyroscopes, which are support vector machine method and C-means support vector machine. The output of X axis which was ranged from −40°C to 60°C based on the micro-electro-mechanical system gyroscope is reduced and analyzed in this article. The results showed the correctness of the two methods. The final results indicate that when the temperature is ranged from −40°C to 60°C, the factor of B is reduced from 0.424 (° h) to 0.02194 (° h) , and when the temperature is ranged from 60°C to −40°C, the factor of B is reduced from 0.1056 (° h) to 0.0329 (° h) , and the temperature drift trend and noise characteristics are improved clearly. [ABSTRACT FROM AUTHOR]

In recent years, High-G MEMS accelerometers have been widely used in aviation, medicine, and other fields. So it is extremely important to improve the accuracy and performance of High-G MEMS accelerometers. For this purpose, we propose a fusion algorithm that combines EMD, wavelet thresholding, and temperature compensation to process measurement data from a High-G MEMS accelerometer. In the fusion algorithm, the original accelerometer signal is first decomposed by EMD to obtain the intrinsic mode function (IMF). Then, sample entropy (SE) is used to divide the IMF components into three segments. The noise segment is directly omitted, wavelet thresholding is performed on the mixing segment, and a GA-BP performs temperature compensation on the drift segment. Finally, signal reconstruction is implemented. Later, a comparative analysis is carried out on the results from four models: EMD, wavelet thresholding, EMD + wavelet thresholding, and EMD + wavelet thresholding + temperature compensation. The experimental data show that the acceleration random walk change from 1712.66 g/h/Hz0.5 to 79.15 g/h/Hz0.5 and the zero-deviation stability change from 49275 g/h to 774.7 g/h. This indicates that the fusion algorithm (EMD + wavelet thresholding + temperature compensation) not only effectively suppresses the noise of high-frequency components but also compensates for temperature drift in the accelerometer. [ABSTRACT FROM AUTHOR]

In this paper, a novel temperature compensation method for a dual-mass MEMS gyroscope is proposed based on drive mode vibration characteristic compensation using a temperature variable resistor. Firstly, the drive and sense modes of the gyroscope re analyzed and investigated, and it is found that the scale factor is proportional to the drive mode amplitude controlling reference voltage. Then, the scale factor temperature compensation method is proposed, and a temperature variable resistor is utilized to compensate the drive amplitude working point and make it change with temperature. In addition, the temperature compensation circuit is designed and simulated. After that, the temperature bias drift is compensated in a modular output. The experimental results show that scale factor and bias variation during the temperature range from −40 °C to 60 °C decrease from 3.680% to 1.577% and 3.880% to 1.913%, respectively. In addition, the bias value improves from 103.395 °/s to 22.478 °/s (optimized 78.26%). The bias stability and angular rate walking parameter are also optimized to 45.97% and 16.08%, respectively, which verify the method proposed in this paper. [ABSTRACT FROM AUTHOR]