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The combination of electrophysiology and optogenetics enables the exploration of how the brain operates down to a single neuron and its network activity. Neural probes are in vivo invasive devices that integrate sensors and stimulation sites to record and manipulate neuronal activity with high spatiotemporal resolution. State-of-the-art probes are limited by tradeoffs involving their lateral dimension, number of sensors, and ability to access independent stimulation sites. Here, we realize a highly scalable probe that features three-dimensional integration of small-footprint arrays of sensors and nanophotonic circuits to scale the density of sensors per cross-section by one order of magnitude with respect to state-of-the-art devices. For the first time, we overcome the spatial limit of the nanophotonic circuit by coupling only one waveguide to numerous optical ring resonators as passive nanophotonic switches. With this strategy, we achieve accurate on-demand light localization while avoiding spatially demanding bundles of waveguides and demonstrate the feasibility with a proof-of-concept device and its scalability towards high-resolution and low-damage neural optoelectrodes.

To advance neuroscience in vivo experiments, it is necessary to probe a high density of neurons in neural networks with single-cell resolution and be able to simultaneously use different techniques, such as electrophysiological recordings and optogenetic intervention, while minimizing brain tissue damage. We first fabricate electrical neural probes with a high density of electrodes and small tip profile (cross section of shank: 47-μm width × 16-μm thickness). Then, with similar substrate and fabrication techniques, we separately fabricate optical neural probes. We finally indicate a fabrication method that may allow integrating the two functionalities into the same device. High-density electrical probes have been fabricated with 64 pads. Interconnections to deliver the signal are 120-nm wide, and the pads are 5 × 25 μm. Separate optical probes with similar shank dimensions with silicon dioxide and silicon nitride ridge single-mode waveguides have also been fabricated. The waveguide core cross section is 250 nm × 160 nm. Light is focused above the waveguide plane in 2.35-μm diameter spots. The actual probes present two output focusing gratings on the shank.

We present a planarized waveguide cavity with an integrated broadband output coupler that improves both the output power and far-field properties of THz quantum cascade laser frequency combs. The laser mirror reflectivity can be tuned by the shape of the end facet, which is obtained with an efficient inverse design algorithm, where the structure is iteratively updated to match the desired figure of merit. Surface emission is achieved with a broadband patch-array antenna, and all the components have been optimized for octave-spanning emission spectra (2-4 THz). Experimentally, we demonstrate a broadband surface-emitting THz quantum cascade laser frequency comb with optical bandwidths of up to 800 GHz, surface emission into a narrow beam with divergence below (20° x 20°) and a peak power of 13 mW.

We present a surface emitting THz quantum cascade laser frequency comb with an adjustable chromatic dispersion compensation via a mechanically tunable GTI cavity. Surface emission and high optical feedback into the laser cavity are achieved by a planarized ridge waveguide design with low reflectivity facets and two broadband patch array antennas for coupling to an external mirror (back side) and for power extraction (front side). We demonstrate direct and reproducible manipulation of the frequency comb state, specifically the comb stability and beatnote frequency tuning, by controlling the position of an external movable mirror.

We present a new planarized waveguide geometry for THz quantum cascade laser frequency combs with improved waveguide losses, RF and thermal dissipation properties. Ridge devices display broadband free-running comb states, and the THz emission can be further broadened by RF injection. Tapered waveguide devices feature a strong field-enhancement effect, which results in an improved comb performance. This includes free-running comb states with strong single beatnotes up to nearly -30 dBm at 90 K, almost three orders of magnitude stronger than for ridge devices. Improved comb operation is maintained also for high operating temperatures, up to 115 K.

We report comb operation of RF injected ring Quantum Cascade Lasers. A coupled waveguide approach is implemented for dispersion compensation while passive bullseye antenna improves the device power extraction and far field. Phase sensitive measurements are presented which hints at the presence of soliton state.

THz quantum cascade lasers (QCLs) based on double metal waveguides feature broadband and high-temperature devices for their use in spectroscopy and sensing. However, their extreme field confinement produces poor output coupling efficiencies and divergent far-fields. Here, we present a planarized THz QCL with an inverse-designed end facet reflector coupled to a surface-emitting patch array antenna. All the components have been optimized for octave-spanning spectral bandwidths between 2 and 4 THz and monolithically integrated on the same photonic chip. We demonstrate this experimentally on broadband THz QCL frequency combs, with measured devices showing a seven-fold improvement in slope efficiency compared to devices with a cleaved facet. They feature a peak power of up to 13.5 mW with surface emission into a narrow beam with a divergence of (17.0° × 18.5°), while broadband fundamental and harmonic comb states spanning up to 800 GHz are observed. [ABSTRACT FROM AUTHOR]

The article discusses the generation of terahertz optical solitons using dispersion-compensated antenna-coupled planarized ring Quantum Cascade Lasers (QCL). The researchers address the challenges of achieving solitons in terahertz ring QCLs, including dispersion compensation and power extraction. They propose a double waveguide structure and a planarization technique to overcome these challenges.

Because of the ultrafast and photon-driven nature of the transport in their active region, we demonstrate that quantum cascade lasers can be operated as resonantly amplified terahertz detectors with wide RF bandwidth. Tunable responsivities up to 50 V/W and noise equivalent powers down to 100 pW/Hz1/2 are demonstrated at 4.7 THz. Constant peak responsivities with respect to the detector temperature are observed up to 80 K. Thanks to the ≈ps intersub-band lifetime, electrical bandwidths larger than 20 GHz can be obtained, allowing the detection of optical beatnotes from quantum cascade THz frequency combs. [ABSTRACT FROM AUTHOR]