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This article presents information on electron impact ionization. For atoms and molecules the term electron impact ionization applies to the process in which one or more electrons bound to a target are removed as a result of collisions between a free energetic electron and a target atom or molecule, thereby leaving the target species positively charged. Nowadays, low-temperature plasmas are being extensively employed for processing semiconductors. Properties of the ionosphere of planets, comets, and Earth can be better understood with the knowledge of electron-impact cross sections. They are also important for calculating the penetration depths of β particles in biological samples.