13 results on '"Chevalier, Xavier"'
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2. Establishing a sidewall image transfer chemo-epitaxial DSA process using 193 nm immersion lithography
3. Spacer patterning lithography as a new process to induce block copolymer alignment by chemo-epitaxy
4. Evaluation of adhesion layers performances for soft UV nanoimprint lithography
5. Accelerate the analysis and optimization of lamellar BCP process using machine learning
6. Graphoepitaxy integration and pattern transfer of lamellar silicon-containing high-chi block copolymers
7. Automated lamellar block copolymer process characterization
8. Evaluation of anti-sticking layers performances for 200mm wafer scale smart NILTM process through surface and defectivity characterizations
9. Use of sequential infiltration synthesis to improve the pattern transfer of PS-b-PLA DSA (Conference Presentation)
10. A track process for solvent annealing of high-χ BCPs
11. Advanced surface affinity control for DSA contact hole shrink applications
12. Contact hole shrink and multiplication by directed self-assembly of block copolymers: from material to integration.
13. Guided self-assembly of block-copolymer for CMOS technology: a comparative study between grapho-epitaxy and surface chemical modification
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