10 results on '"Mairiaux, E."'
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2. Micro-Electro-Mechanical-Systems advances for measurements at small scales: the vertical silicon probes technology extended to nearfield optics
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3. When capacitive transduction meets the thermomechanical limit: Towards femto-newton force sensors at very high frequency
4. 5.4 MHz dog-bone oscillating AFM probe with thermal actuation and piezoresistive detection
5. Piezo-resistive ring-shaped AFM sensors with piconewton force resolution
6. Conception and fabrication of piezo-resistive ring-shaped AFM probes
7. DNA origami imaging with 10.9 MHz AFM MEMS probes
8. Optimal design of non intuitive compliant microgripper with high resolution
9. 4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips
10. Selective wet chemical etching of GaInSb and AlInSb for 6.25 Å HBT fabrication
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