Author: "Melzer, Marcel" / Publication Type: Conference Materials - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Melzer, Marcel"' showing total 6 results

Start Over Author "Melzer, Marcel" Publication Type Conference Materials

6 results on '"Melzer, Marcel"'

1. High precision electrostatic MEMS actuators for in-plane Fabry-Pérot gas sensors

Author: Shaporin, Alexey, primary, Wecker, Julia, additional, Runge, Juliane, additional, Voigt, Sebastian, additional, Melzer, Marcel, additional, Kurth, Steffen, additional, and Hiller, Karla, additional
Published: 2024
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2. Optimal design of piezoelectric MEMS for vibration monitoring system with nanoionics zero-energy memory elements

Author: Shaporin, Alexey, primary, Stöckel, Chris, additional, Melzer, Marcel, additional, Schaller, Falk, additional, Forke, Roman, additional, Zimmermann, Sven, additional, and Kuhn, Harald, additional
Published: 2023
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3. Design and technology for uniform aluminum nitride piezoelectric micromachined ultrasonic transducers with radial array

Author: Stoeckel, Chris, primary, Melzer, Marcel, additional, Meinel, Katja, additional, Tavakolibasti, Majid, additional, Forke, Roman, additional, Zimmermann, Sven, additional, Otto, Thomas, additional, and Kuhn, Harald, additional
Published: 2021
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4. Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride

Author: Meinel, Katja, primary, Stoeckel, Chris, additional, Melzer, Marcel, additional, Zimmermann, Sven, additional, Forke, Roman, additional, Hiller, Karla, additional, and Otto, Thomas, additional
Published: 2019
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5. Piezoelectric Scanning Micromirror with Large Scan Angle Based on Thin Film Aluminum Nitride

Author: Meinel, Katja, primary, Stoeckel, Chris, additional, Melzer, Marcel, additional, Zimmermann, Sven, additional, Forke, Roman, additional, Hiller, Karla, additional, and Otto, Thomas, additional
Published: 2019
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6. Thin Film Piezoelectric Aluminum Nitride for Piezoelectric Micromachined Ultrasonic Transducers

Author: Stoeckel, Chris, primary, Meinel, Katia, additional, Melzer, Marcel, additional, and Otto, Thomas, additional
Published: 2018
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