8 results on '"Muroya, Yusa"'
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2. Reaction mechanisms and EB patterning evaluation of Sn-complex-side-chain polymer used for EUV lithography
3. EUV sensitization mechanisms of carboxylic acids used as ligands of metal oxide nanocluster resists (Conference Presentation)
4. Analysis of line-and-space patterns of ZrO2 nanoparticle resist on the basis of EUV sensitization mechanism
5. Pattern formation mechanism of zirconia nanoparticle resist used for extreme-ultraviolet lithography (Conference Presentation)
6. Reaction mechanisms and EB patterning evaluation of Sn-complex-side-chain polymer used for EUV lithography.
7. Corrosion Test of 304 Stainless Steel in Hydrazine and Methanol Solutions at 320°C Under Gamma-Irradiation and Gamma Radiolysis of Hydrazine and Methanol
8. Measurement and Timing-Control Techniques of Femtosecond Electron Pulse.
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