5 results on '"Okada, Takeru"'
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2. Germanium nano disk array fabrication by combination of bio template and neutral beam etching for solar cell application
3. Effect of miniband formation in a quantum dot super lattice fabricated by combination of bio-template and neutral beam etching for high efficiency quantum dot solar cells
4. Damage-less graphene etching by oxygen neutral beam for graphene nanoribbon fabrication
5. Novel ArF photoresist polymer to suppress the roughness formation in plasma etching processes
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