Author: "Syoji H" / Publication Type: Conference Materials - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Syoji H"' showing total 3 results

Start Over Author "Syoji H" Publication Type Conference Materials

3 results on '"Syoji H"'

1. A study on the V/sub th/ shift of HfAlOx MISFETs with n+/p+ poly-Si and TiN gate electrodes fabricated by replacement gate process

Author: Akasaka, Y., primary, Miyagawa, K., additional, Syoji, H., additional, Ogawa, O., additional, Kawahara, T., additional, Horiuchi, A., additional, Mitsuhashi, R., additional, Maeda, T., additional, Muto, A., additional, Kasai, N., additional, Yasuhira, M., additional, and Arikado, T., additional
Published: 2003
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2. Gate-last MISFET structures and process for high-k and metal gate MISFETs characterization.

Author: Matsuki, T., Torii, K., Maeda, T., Syoji, H., Kiyono, K., Akasaka, Y., Hayashi, K., Kasai, N., and Arikado, T.
Published: 2004
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3. A study on the Vth shift of HfAlOx MISFETs with n+/p+ poly-Si and TiN gate electrodes fabricated by replacement gate process.

Author: Akasaka, Y., Miyagawa, K., Syoji, H., Ogawa, O., Kawahara, T., Horiuchi, A., Mitsuhashi, R., Maeda, T., Muto, A., Kasai, N., Yasuhira, M., and Arikado, T.
Published: 2003
Full Text: View/download PDF

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