Author: "Volkov, Vladimir T." / Publication Type: Conference Materials - Searchworks@Jio Institute Digital Library Search Results

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Start Over Author "Volkov, Vladimir T." Publication Type Conference Materials

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1. Technological problems in forming Si waveguide lamellar diffraction gratings and 2D photonic crystals by plasma and wet etching of Si

Author: Il'in, Aleksandr I., primary, Volkov, Vladimir T., additional, Trofimov, Oleg V., additional, and Barabanenkov, Mikhail Yu., additional
Published: 2015
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