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Abstract: Dual pulse actuation voltage waveforms that are capable of mitigating micro-electromechanical system (MEMS) switch bouncing are presented. The displacement and velocity of the MEMS switch membrane actuated using these waveforms are then simulated and compared. To eliminate bouncing, the velocity of the membrane should ideally be zero just before contact is made. Otherwise the large momentum from high velocity impact will bounce the membrane back, extending the switching time and bringing about wear and tear to the contact surfaces. The effect of MEMS switch parameter variations on the bouncing membrane is then studied for switches with different gap widths. The impact of the variation in the voltage waveform is also investigated in this paper. The exponentially saturating dual-pulse actuation waveform has shown great robustness against both switch and voltage waveform parameter variations. The waveform also exhibited the fastest switching time for a wider range of parameters variations. Practical experiments were carried out on TeraVicta TT712-68CSP MEMS switch to corroborate the findings. [Copyright &y& Elsevier]

Abstract: This work focuses on electrostatically actuated micro-electro-mechanical systems (MEMS) capacitive switches, intended for adaptive output stage of power amplifiers. These devices are particularly attractive because theoretically they are capable of very high quality factor values due to the air gap between plates and the low resistivity of lines and bridge. On the other hand, substrate parasitic effects, overlooked up to date, can seriously impair device performance. In this paper, we introduce a lumped element equivalent circuit taking into account substrate effects. Model validation is based on measurements carried out in the 50MHz–40GHz range. [Copyright &y& Elsevier]