1. Modeling of GaN/AlN heterostructure-based nano pressure sensors
- Author
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Massachusetts Institute of Technology. Department of Mechanical Engineering, Sinha, Niraj, Melnik, R. V. N., Patil, S., Massachusetts Institute of Technology. Department of Mechanical Engineering, Sinha, Niraj, Melnik, R. V. N., and Patil, S.
- Abstract
We quantify the influence of thermopiezoelectric effects in nano-sized Al[subscript x]Ga[subscript 1-x]N/GaN heterostructures for pressure sensor applications based on the barrier height modulation principle. We use a fully coupled thermoelectromechanical formulation, consisting of balance equations for heat transfer, electrostatics and mechanical field. To estimate the vertical transport current in the heterostructures, we have developed a multi-physics model incorporating thermionic emission, thermionic field emission, and tunneling as the current transport mechanisms. A wide range of thermal (0-300 K) and pressure (0-10 GPa) loadings has been considered. The results for the thermopiezoelectric modulation of the barrier height in these heterostructures have been obtained and optimized. The calculated current shows a linear decrease with increasing pressure. The linearity in pressure response suggests that Al[subscript x]Ga[subscript 1-x]N/GaN heterostructure-based devices are promising candidates for pressure sensor applications under severe environmental conditions.
- Published
- 2010