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We devise a unique heteronanostructure array to overcome a persistent issue of simultaneously utilizing the surface-enhanced Raman scattering, inexpensive, Earth-abundant materials, large surface areas, and multifunctionality to demonstrate near single-molecule detection. Room-temperature plasma-enhanced chemical vapor deposition and thermal evaporation provide high-density arrays of vertical TiO2nanotubes decorated with Ag nanoparticles. The role of the TiO2nanotubes is 3-fold: (i) providing a high surface area for the homogeneous distribution of supported Ag nanoparticles, (ii) increasing the water contact angle to achieve superhydrophobic limits, and (iii) enhancing the Raman signal by synergizing the localized electromagnetic field enhancement (Ag plasmons) and charge transfer chemical enhancement mechanisms (amorphous TiO2) and by increasing the light scattering because of the formation of vertically aligned nanoarchitectures. As a result, we reach a Raman enhancement factor of up to 9.4 × 107, satisfying the key practical device requirements. The enhancement mechanism is optimized through the interplay of the optimum microstructure, nanotube/shell thickness, Ag nanoparticles size distribution, and density. Vertically aligned amorphous TiO2nanotubes decorated with Ag nanoparticles with a mean diameter of 10–12 nm provide enough sensitivity for near-instant concentration analysis with an ultralow few-molecule detection limit of 10–12M (Rh6G in water) and the possibility to scale up device fabrication.

Herein, we present the development of supported organic nanofabrics formed by a conformal polymer-like interconnection of small-molecule organic nanowires and nanotrees. These organic nanostructures are fabricated by a combination of vacuum and plasma-assisted deposition techniques to generate step by step, single-crystalline organic nanowires forming one-dimensional building blocks, organic nanotrees applied as three-dimensional templates, and the polymer-like shell that produces the final fabric. The complete procedure is carried out at low temperatures and is compatible with an ample variety of substrates (polymers, metal, ceramics; either planar or in the form of meshes) yielding flexible and low solid-fraction three-dimensional nanostructures. The systematic investigation of this progressively complex organic nanomaterial delivers key clues relating their wetting, nonwetting, and anti-icing properties with their specific morphology and outer surface composition. Water contact angles higher than 150° are attainable as a function of the nanofabric shell thickness with outstanding freezing-delay times (FDT) longer than 2 h at −5 °C. The role of the extremely low roughness of the shell surface is settled as a critical feature for such an achievement. In addition, the characteristic interconnected microstructure of the nanofabrics is demonstrated as ideal for the fabrication of slippery liquid-infused porous surfaces (SLIPS). We present the straightforward deposition of the nanofabric on laser patterns and the knowledge of how this approach provides SLIPS with FDTs longer than 5 h at −5 °C and 1 h at −15 °C.

The thin film configuration presents obvious practical advantages over the 1D implementation in energy harvesting systems such as easily manufacturing and processing, and long-lasting and stable devices. However, ZnO-based piezoelectric nanogenerators (PENGs) generally rely on the exploitation of single-crystalline nanowires because of their self-orientation in the c-axis direction and ability to accommodate long deformations resulting in high piezoelectric performance. Herein, we show an innovative approach to produce PENGs by combining polycrystalline ZnO layers fabricated at room temperature by plasma-assisted deposition with supported small-molecule organic nanowires (ONWs) acting as 1D scaffolds. Such hybrid nanostructures present convoluted core-shell morphology, formed by a single-crystalline organic nanowire conformally surrounded by a poly-crystalline ZnO shell and combine the organic core mechanical properties with the ZnO layer piezoelectric response. In a step forward towards the integration of multiple functions within a single wire, we have also developed ONW-Au-ZnO nanoarchitectures including a gold shell acting as inner electrode achieving output piezo-voltages up to 170 mV. The synergistic combination of functionalities in the ONW-Au-ZnO devices promotes an enhanced performance generating piezo-currents one order of magnitude larger than the ONW-ZnO nanowires and superior to the thin film nanogenerators for equivalent and higher thicknesses.

The ability to control the porosity of thin oxide films is a key factor determining their properties. Despite the abundance of dry processes for synthesizing oxide porous layers, a high porosity range is typically achieved by spin-coating-based wet chemical methods. Besides, special techniques such as supercritical drying are required to replace the pore liquid with air while maintaining the porous network. In this study, we propose a new method for the fabrication of ultraporous titanium dioxide thin films at room or mild temperatures (T≤ 120 °C) by a sequential process involving plasma deposition and etching. These films are conformal to the substrate topography even for high-aspect-ratio substrates and show percolated porosity values above 85% that are comparable to those of advanced aerogels. The films deposited at room temperature are amorphous. However, they become partly crystalline at slightly higher temperatures, presenting a distribution of anatase clusters embedded in the sponge-like open porous structure. Surprisingly, the porous structure remains after annealing the films at 450 °C in air, which increases the fraction of embedded anatase nanocrystals. The films are antireflective, omniphobic, and photoactive, becoming superhydrophilic when subjected to ultraviolet light irradiation. The supported, percolated, and nanoporous structure can be used as an electron-conducting electrode in perovskite solar cells. The properties of the cells depend on the aerogel-like film thickness, which reaches efficiencies close to those of commercial mesoporous anatase electrodes. This generic solvent-free synthesis is scalable and applicable to ultrahigh porous conformal oxides of different compositions, with potential applications in photonics, optoelectronics, energy storage, and controlled wetting.

M/WO3(M = Pt, Pd) systems formed by a porous WO3thin film decorated by metal nanoparticles are known for their reversible coloring upon exposure to H2at room temperature. In this work, this gasochromic behavior is investigated in situ by means of near-ambient photoemission (NAPP). Pt/WO3systems formed by very small Pt nanoparticles (10 ± 1 nm average size) incorporated in the pores of nanocolumnar WO3thin films prepared by magnetron sputtering at an oblique angle have been exposed to a small pressure of hydrogen at ambient temperature. The recorded UV–vis transmission spectra showed the reversible appearance of a very intense absorption band responsible for the blue coloration of these gasochromic films. In an equivalent experiment carried out in the NAPP spectrometer, W 4f, O 1s, Pt 4f, and valence band photoemission spectra have been recorded at various photon energies to follow the evolution of the reduced tungsten species and hydroxyl groups formed upon film exposure to hydrogen. The obtained results are compared with those of a conventional X-ray photoemission study after hydrogen exposure between 298 and 573 K. As investigated by NAPP, the gasochromic behavior at 298 K is accounted for by a reaction scheme in which hydrogen atoms resulting from the dissociation of H2onto the Pt nanoparticles are spilt over to the WO3substrate where they form surface OH–/H2O species and subsurface W5+cations preferentially located in buried layers of the oxide network.

Oblique angle deposition (OAD) is a powerful technique for the fabrication of porous nanostructured oxide thin films. OAD films typically present a columnar tilted nanostructure due to geometrical shadowing effects during the thin film growth. In this work, we study the fabrication of transparent and conducting indium tin oxide films (ITO) by OAD assisted by a microwave ECR plasma. The objective of assisting the deposition with a plasma discharge is to modify the growth mechanism of the OAD process introducing additional parameters to control the columnar microstructure, composition, porosity of the films. The results indicate the OAD ITO deposition assisted by the plasma discharge is a very effective process to develop in-plane structural anisotropy in the ITO nanocolumnar films what determines their electrical properties.

We present a low-temperature versatile protocol for the fabrication of plasma nanocomposite thin films to act as tunable emitters and optical gain media. The films are obtained by the remote plasma-assisted deposition of a 4-(dicyano-methylene)-2-methyl-6-(4-dimethylamino-styryl)-4H-pyran (DCM) laser dye alongside adamantane. The experimental parameters that determine the concentration of the dye in the films and their optical properties, including light absorption, the refractive index, and luminescence, are evaluated. Amplified spontaneous emission experiments in the DCM/adamantane nanocomposite waveguides show the improvement of the copolymerized nanocomposites’ properties compared to films that were deposited with DCM as the sole precursor. Moreover, one-dimensional distributed feed-back laser emission is demonstrated and characterized in some of the nanocomposite films that are studied. These results open new paths for the optimization of the optical and lasing properties of plasma nanocomposite polymers, which can be straightforwardly integrated as active components in optoelectronic devices.

Bragg microcavities (BMs) formed by the successive stacking of nanocolumnar porous SiO2and TiO2layers with slanted, zigzag, chiral, and vertical configurations are prepared by physical vapor deposition at oblique angles while azimuthally varying the substrate orientation during the multilayer growth. The slanted and zigzag BMs act as wavelength-selective optical retarders when they are illuminated with linearly polarized light, while no polarization dependence is observed for the chiral and vertical cavities. This distinct optical behavior is attributed to a self-nanostructuration mechanism involving a fence-bundling association of nanocolumns as observed by focused ion beam scanning electron microscopy in the slanted and zigzag microcavities. The outstanding retarder response of the optically active BMs can be effectively modulated by dynamic infiltration of nano- and mesopores with liquids of different refraction indices acting as a switch of the polarization behavior. The unprecedented polarization and tunable optofluidic properties of these nanostructured photonic systems have been successfully simulated with a simple model that assumes a certain birefringence for the individual stacked layers and accounts for the light interference phenomena developed in the BMs. The possibilities of this type of self-arranged nanostructured and optically active BMs for liquid sensing and monitoring applications are discussed.

ITO thin films have been prepared by electron beam evaporation at oblique angles (OA), directly and while assisting their growth with a downstream plasma. The films microstructure, characterized by scanning electron microscopy, atomic force microscopy, and glancing incidence small-angle X-ray scattering, consisted of tilted and separated nanostructures. In the plasma assisted films, the tilting angle decreased and the nanocolumns became associated in the form of bundles along the direction perpendicular to the flux of evaporated material. The annealed films presented different in-depth and sheet resistivity as confirmed by scanning conductivity measurements taken for the individual nanocolumns. In addition, for the plasma-assisted thin films, two different sheet resistance values were determined by measuring along the nanocolumn bundles or the perpendicular to it. This in-plane anisotropy induces the electrochemical deposition of elongated gold nanostructures. The obtained Au-ITO composite thin films were characterized by anisotropic plasmon resonance absorption and a dichroic behavior when examined with linearly polarized light.

We present a straightforward procedure of self-surface patterning with potential applications as large area gratings, invisible labeling, optomechanical transducers, or smart windows. The methodology is based in the formation of parallel micrometric crack patterns when polydimethylsiloxane foils coated with tilted nanocolumnar SiO2thin films are manually bent. The SiO2thin films are grown by glancing angle deposition at room temperature. The results indicate that crack spacing is controlled by the film nanostructure independently of the film thickness and bending curvature. They also show that the in-plane microstructural anisotropy of the SiO2films due to column association perpendicular to the growth direction determines the anisotropic formation of parallel cracks along two main axes. These self-organized patterned foils are completely transparent and work as customized reversible diffraction gratings under mechanical activation.

Transparent nanocolumnar porous ZnO thin films have been prepared by plasma-enhanced chemical vapor deposition. By controlling the H2/O2ratio in the plasma gas, the deposition conditions were optimized to obtain an intense exciton emission at around 381 nm and virtually no luminescence in the visible region associated with electronic states in the gap. The intensity of the exciton band varied significantly and reversibly with the partial pressure of oxygen in the environment. This behavior and its variations with temperature and water vapor sustain the use of these thin films as photonic sensors of oxygen. Further experiments in liquid water show that fluorescence intensity also varies with the amount of dissolved oxygen even for concentrations lower than 0.02 mg/L where commercial oxygen galvanic sensors show limited sensitivity. These results and the use of ZnO as photonic sensor of oxygen are discussed by assuming a classical mechanism involving the photoactivated adsorption of oxygen when this oxide is irradiated with UV light during its fluorescence interrogation.

Porous Bragg microcavities formed by stacking a series of porous nanocolumnar layers with alternate low (SiO2) and high (TiO2) refractive index materials have been prepared by physical vapor deposition at glancing angles (GLAD). By strictly controlling the porosity and refractive index of the individual films, as well as the relative orientation of the nanocolumns from one layer to the next, very porous and nondispersive high optical quality microcavities have been manufactured. These photonic structures have been implemented into responsive devices to characterize liquids, mixtures of liquids, or solutions flowing through them. The large displacements observed in the optical spectral features (Bragg reflector gap and resonant peak) of the photonic structures have been quantitatively correlated by optical modeling with the refractive index of the circulating liquids. Experiments carried out with different glucose and NaCl solutions and mixtures of water plus glycerol illustrate the potentialities of these materials to serve as optofluidic devices to determine the concentration of solutions or the proportion of two phases in a liquid mixture.

This work reports the preparation, by a new remote assisted plasma deposition process, of luminescent nanocomposite thin films consisting of an insoluble organic matrix where photonically active perylene molecules are embedded. The films are obtained by the remote plasma deposition of adamantane and perylene precursor molecules. The results show that the adamantane precursor is very effective to improve the perylene–adamantane nanocomposite transparency in comparison with plasma deposited perylene films. The plasma deposited adamantane films have been characterized by secondary-ion mass spectrometry and FT-IR spectroscopy. These techniques and atomic force microscopy (AFM) have been also used for the characterization of the nanocomposite films. Their optical properties (UV–vis absorption, fluorescence, and refractive index) have been also determined and their sensing properties toward NO2studied. It is found that samples with the perylene molecules embedded within the transparent plasma deposited matrix are highly sensitive toward this gas and that the sensitivity of the films can be adjusted by modifying the aggregation state of the perylene molecules, as determined by the analysis of their fluorescence spectra. By monitoring the fluorescence emission of these films, it has been possible to detect a NO2concentration as low as 0.5 ppm in air at room temperature. Because of their chemical stability and transparency in the UV region, the remote plasma deposited adamantane thin films have revealed as an optimum host matrix for the development of photonically active composites for sensing applications.

Nanoporous ZnO thin films presenting a tunable nanostructure and photoluminescence (PL) were grown by plasma enhanced vapor deposition on surface oxidized Si substrates. These films consist of c-axis oriented wurtzite ZnO nanocolumns whose topology, crystallinity, and PL can be tuned through the substrate temperature (varied in the 300−573 K range) and the nature of the plasma assistance (pure O2, O2/Ar, O2/H2, or O2/N2mixture). In particular, these processing parameters influence the intensity of the UV and visible PL bands of the films, related to excitonic and defective radiative transitions, respectively. Increasing the substrate temperature enhances the UV PL and rubs out the visible PL due to the increase of grain size and the removal of interstitial defects. Additional tuning of the intensity ratio between the UV and visible bands can be done by controlling the film thickness. A decrease of the UV PL is observed when the films go thicker, an effect that is likely to be linked to the microstructure of the films rather than to their crystallinity that is improved upon increasing of the film thickness, as seen from PL spectroscopy and XRD measurements. Indeed, a gradient of stress, decreasing from the substrate to the surface, is evidenced and related to a concentration gradient of interstitial defects. The drawbacks of the thickness effect, which prohibits growing thick films with a high optical quality, can be bypassed by growing the films in a O2/H2plasma.

Fluorescent tetracationic porphyrin (TMPyP) molecules have been incorporated into optically transparent TiO2thin films acting as a host material. The films, with a columnar structure and open pores, were prepared by electron evaporation at glancing angles (GAPVD). The open porosity of the films has been estimated by measuring a water adsorption isotherm with a quartz crystal monitor. TMPyP molecules were infiltrated in the host thin films by their immersion into water solutions at controlled values of pH. The state of the adsorbed molecules, the infiltration efficiency, and the adsorption kinetics were assessed by analyzing the optical response of the films by UV−vis absorption and fluorescence techniques. The infiltration efficiency was directly correlated with the acidity of the medium, increasing at basic pHs as expected from simple considerations based on the concepts of the point of zero charge (PZC) developed for colloidal oxides. By a quantitative evaluation based on the analysis of the UV spectra, the infiltration process has been described by a Langmuir type adsorption isotherm and an Elovich-like kinetics. The accessibility of the infiltrated molecules in the TMPyP/TiO2composite films is assessed by following the changes of their optical properties when exposed to the acid vapors and their subsequent recovery with time.

This work reports about the preparation of plasma polymerized thin films of perylene with thicknesses ∼30−150 nm and their characterization by different methods and the analysis of their optical properties. Highly absorbent and fluorescent films have been obtained by this method that combines the sublimation of the perylene molecules and their controlled polymerization by the interaction with remote Ar plasma. The polymeric films are very flat with a root mean square (rms) roughness in the range 0.3−0.4 nm. In contrast with the sublimated layers of perylene that present a high scattering of light, the polymerized films depict the well-defined absorption bands in the region 400−450 nm and fluorescence spectra of the perylene molecule at ∼475 nm. The films are formed by a matrix formed by cross-linked fragments of perylene and intact molecules that confer the observed optical properties to this material. The optical and microstructural characteristics of this type of thin films and the possibility to perform their deposition by using lithographic procedures make them suitable for their integration into photonic components for various applications. A preliminary study of the use of these films as an optical sensor of NO2is also presented.

Ion-beam sputtering deposition has been used in two ways, as granular multilayers and as cosputtered film, to elaborate Ag-Si_3N_4 nanocermets. Multilayer deposition creates slightly oblate clusters, and cosputtering produces two cluster families: elongated clusters within the Si_3N_4 matrix and larger ones at the film surface. The transmittance spectra of these nanocermets are characterized by a surface plasmon resonance. In the reported research the position of this resonance is related to the morphological properties of silver nanoclusters, which are studied by transmission-electron microscopy, grazing-incidence small-angle x-ray scattering, and atomic-force microscopy.

Oblique angle deposition (OAD) is a powerful technique for the fabrication of porous nanostructured oxide thin films. OAD films typically present a columnar tilted nanostructure due to geometrical shadowing effects during the thin film growth. In this work, we study the fabrication of transparent and conducting indium tin oxide films (ITO) by OAD assisted by a microwave ECR plasma. The objective of assisting the deposition with a plasma discharge is to modify the growth mechanism of the OAD process introducing additional parameters to control the columnar microstructure, composition, porosity of the films. The results indicate the OAD ITO deposition assisted by the plasma discharge is a very effective process to develop in-plane structural anisotropy in the ITO nanocolumnar films what determines their electrical properties.