1. High-Speed and Responsivity 4H-SiC 8 × 8 p-i-n Ultraviolet Photodiode Arrays With Micro-Hole Structure
- Author
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Fu, Zhao, Zhang, Mingkun, Han, Shan, Cai, Jiafa, Hong, Rongdun, Chen, Xiaping, Lin, Dingqu, Wu, Shaoxiong, Zhang, Yuning, Fu, Deyi, Wu, Zhengyun, Zhang, Baoping, Zhang, Feng, and Zhang, Rong
- Abstract
In this brief, high-performance
$8\times8$ $4~\mu \text{m}$ + layer) to the i layer, which will elevate the effective absorption of UV light. The pixels in 4H-SiC p-i-n array show a low dark current of less than$2\times 10^{-{14}}$ $\mu \text{m}$ $10^{{4}}$ - Published
- 2023
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