1. Airborne Rangefinding With pMUTs Array Using Differential Structure
- Author
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Liu, Tao, Zhang, Jiahuan, Li, Dongxiao, Wu, Pengfan, Zhang, Jiajia, Dou, Hanjie, Zhang, Mingyang, Yang, Xiao, Zhang, Liuqiang, and Mu, Xiaojing
- Abstract
Here, we report a differential ring array of piezoelectric micromachined ultrasonic transducers (pMUTs) for ultralong-range detection. Among them, the differential structure is used to improve the sensitivity of the device, and the ring array is used to improve the generated sound intensity. The synergy between the differential structure and the ring array improves the acoustic performance of pMUTs. The piezoelectric material adopts aluminum nitride (AlN) thin film compatible with complementary metal–oxide–semiconductor (CMOS) process. The resonant frequency of the device (80 kHz), the piezoelectric film radius (
$500 \mu \text{m}$ $5\times5$ $\ge 0.6$ - Published
- 2023
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